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Articles - 15

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1	Ermakova E. , Tsyrendorzhieva I. , Mareev A. , Pavlov D. , Maslova O. , Shayapov V. , Maksimovskiy E. , Yushina I. , Kosinova M. Carbon-Rich Plasma-Deposited Silicon Oxycarbonitride Films Derived from 4-(Trimethylsilyl)morpholine as a Novel Single-Source Precursor ChemPlusChem. 2024. V.89. e202400094 :1-13. DOI: 10.1002/cplu.202400094 WOS Scopus РИНЦ OpenAlex
2	Ermakova E. , Shayapov V. , Saraev A. , Maximovsky E. , Kirienko V. , Khomyakov M. , Sulyaeva V. , Kolodin A. , Gerasimov E. , Kosinova M. Effect of plasma power on growth process, chemical structure, and properties of PECVD films produced from hexamethyldisilane and ammonia Surface & Coatings Technology. 2024. V.490. 131131 :1-12. DOI: 10.1016/j.surfcoat.2024.131131 WOS Scopus РИНЦ OpenAlex
3	Ermakova E.N. , Maksimovsky E.A. , Fedorenko A.D. , Shapovalova A.A. , Khizhnyak E.A. , Kosinova M.L. Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia Journal of Structural Chemistry. 2024. V.65. N8. P.1488-1501. DOI: 10.1134/s002247662408002x WOS Scopus РИНЦ OpenAlex
4	Chagin M.N. , Ermakova E.N. , Shayapov V.R. , Sulyaeva V.S. , Yushina I.V. , Maksimovskiy E.A. , Dudkina S.P. , Saraev A.A. , Gerasimov E.Y. , Mogilnikov K.P. , Kolodin A.N. , Kosinova M.L. SiCx:H and SiCxNy:H Amorphous Films Prepared from Hexamethyldisilane Vapors Journal of Structural Chemistry. 2024. V.65. N10. P.2041-2057. DOI: 10.1134/s0022476624100147
5	Chagin M.N. , Ermakova E.N. , Shayapov V.R. , Sulyaeva V.S. , Maksimovskii E.A. , Yushina I.V. , Kosinova M.L. Amorphous SiCx:H and SiCxNy:H Films Obtained from Hexamethyldisilane Vapor in Inductively Coupled RF Discharge Plasma High Energy Chemistry. 2024. V.58. N6. P.693-698. DOI: 10.1134/S0018143924700565 Scopus РИНЦ OpenAlex
6	Ermakova E. , Kolodin A. , Fedorenko A. , Yushina I. , Shayapov V. , Maksimovskiy E. , Kosinova M. Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture Coatings. 2023. V.13. N2. 310 :1-22. DOI: 10.3390/coatings13020310 WOS Scopus OpenAlex
7	Ermakova E. , Sysoev S. , Tsyrendorzhieva I. , Mareev A. , Maslova O. , Shayapov V. , Maksimovskiy E. , Yushina I. , Kosinova M. 1,4-Bis(trimethylsilyl)piperazine—Thermal Properties and Application as CVD Precursor Coatings. 2023. V.13. N6. 1045 :1-23. DOI: 10.3390/coatings13061045 WOS Scopus OpenAlex
8	Ermakova E.N. , Maksimovskii E.A. , Yushina I.V. , Kosinova M.L. CVD Synthesis of Graphitic Carbon Nitride Films from Melamine Russian Journal of Inorganic Chemistry. 2023. V.68. N2. P.208-215. DOI: 10.1134/s0036023622602252 WOS Scopus РИНЦ OpenAlex
9	Ermakova Е. , Kosinova M. Organosilicon compounds as single-source precursors for SiCN films production Journal of Organometallic Chemistry. 2022. V.958. 122183 :1-28. DOI: 10.1016/j.jorganchem.2021.122183 WOS Scopus РИНЦ OpenAlex
10	Ermakova E. , Mogilnikov K. , Asanov I. , Fedorenko A. , Yushina I. , Kichay V. , Maksimovskiy E. , Kosinova M. Chemical Structure, Optical and Dielectric Properties of PECVD SiCN Films Obtained from Novel Precursor Coatings. 2022. V.12. N11. 1767 :1-17. DOI: 10.3390/coatings12111767 WOS Scopus РИНЦ OpenAlex
11	Ermakova E.N. , Sysoev S.V. , Nikolaev R.E. , Nikulina L.D. , Lis A.V. , Tsyrendorzhieva I.P. , Rakhlin V.I. , Plyusnin P.E. , Kosinova M.L. Thermal properties of some organosilicon precursors for chemical vapor deposition Journal of Thermal Analysis and Calorimetry. 2016. V.126. P.609-616. DOI: 10.1007/s10973-016-5563-y WOS Scopus РИНЦ OpenAlex
12	Ermakova E. , Mogilnikov K. , Rumyantsev Y. , Kichay V. , Maximovskii E. , Semenova O. , Kosinova M. Study of Cu diffusion behavior in carbon rich SiCN:H films deposited from trimethylphenylsilane Thin Solid Films. 2015. V.588. P.39-43. DOI: 10.1016/j.tsf.2015.04.058 WOS Scopus РИНЦ OpenAlex
13	Ermakova E.N. , Sysoev S.V. , Nikulina L.D. , Tsyrendorzhieva I.P. , Rakhlin V.I. , Kosinova M.L. Synthesis and characterization of organosilicon compounds as novel precursors for CVD processes Thermochimica Acta. 2015. V.622. P.2-8. DOI: 10.1016/j.tca.2015.02.004 WOS Scopus РИНЦ OpenAlex
14	Ermakova E. , Rumyantsev Y. , Shugarov A. , Panin A. , Kosinova M. PECVD synthesis, optical and mechanical properties of silicon carbon nitride films Applied Surface Science. 2015. V.339. P.102-108. DOI: 10.1016/j.apsusc.2015.02.155 WOS Scopus РИНЦ OpenAlex
15	Ermakova E. , Lis A. , Kosinova M. , Rumyantsev Y. , Maximovskii E. , Rakhlin V. Bis(trimethylsilyl)Ethylamine: Synthesis, Properties and its use as CVD Precursor Physics Procedia. 2013. V.46. P.209-218. DOI: 10.1016/j.phpro.2013.07.069 WOS Scopus РИНЦ OpenAlex