Synthesis of TiSiN films by reactive magnetron sputtering at room temperature

Synthesis of TiSiN films by reactive magnetron sputtering at room temperature Full article

Journal

Inorganic Materials
ISSN: 0020-1685 , E-ISSN: 1608-3172

Output data

Year: 2024, Pages: 1 Pages count : 1

Authors

Sulyaeva V.S. ¹ , Syrokvashin M.M. ¹ , Kozhevnikov A.K. ¹ , Ermakova E.N. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry SB RAS

Sulyaeva V.S. , Syrokvashin M.M. , Kozhevnikov A.K. , Ermakova E.N.
Synthesis of TiSiN films by reactive magnetron sputtering at room temperature
Inorganic Materials. 2024. P.1.

Суляева В.С. , Сыроквашин М.М. , Кожевников А.К. , Ермакова Е.Н.
Синтез пленок TiSiN методом реактивного магнетронного распыления при комнатной температуре
Неорганические материалы. 2024. Т.60. №2. С.164-174. DOI: 10.31857/S0002337X24020044 РИНЦ

No identifiers

Пока нет цитирований