Amorphous Dielectric SiCNH Films Prepared by PECVD Method from Hexamethyldisilazane Vapors

Amorphous Dielectric SiCNH Films Prepared by PECVD Method from Hexamethyldisilazane Vapors Full article

Journal

Journal of Structural Chemistry
ISSN: 1573-8779 , E-ISSN: 0022-4766

Output data

Year: 2025, Volume: 66, Number: 11, Pages: 2292-2308 Pages count : 17 DOI: 10.1134/s0022476625110046

Authors

Ermakova E.N. ¹ , Plekhanov A.G. ¹ , Shayapov V.R. ¹ , Sulyaeva V.S. ¹ , Maksimovsky E.A. ¹ , Petukhova D.E. ¹ , Saraev A.A. ² , Gerasimov E.Y. ² , Kirienko V.V. ³ , Khomyakov M.N. ⁴ , Kosinova M.L. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
2	Boreskov Institute of Catalysis, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
3	Rzhanov Institute of Semiconductor Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia
4	Institute of Laser Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

Ermakova E.N. , Plekhanov A.G. , Shayapov V.R. , Sulyaeva V.S. , Maksimovsky E.A. , Petukhova D.E. , Saraev A.A. , Gerasimov E.Y. , Kirienko V.V. , Khomyakov M.N. , Kosinova M.L.
Amorphous Dielectric SiCNH Films Prepared by PECVD Method from Hexamethyldisilazane Vapors
Journal of Structural Chemistry. 2025. V.66. N11. P.2292-2308. DOI: 10.1134/s0022476625110046 WOS Scopus OpenAlex

Ермакова Е.Н. , Плеханов А.Г. , Шаяпов В.Р. , Суляева В.С. , Максимовский Е.А. , Петухова Д.Е. , Сараев А.А. , Герасимов Е.Ю. , Кириенко В.В. , Хомяков М.Н. , Косинова М.Л.
АМОРФНЫЕ ДИЭЛЕКТРИЧЕCКИЕ ПЛЕНКИ SiCNH, ПОЛУЧЕННЫЕ МЕТОДОМ PECVD ИЗ ПАРОВ ГЕКСАМЕТИЛДИСИЛАЗАНА
Журнал структурной химии. 2025. Т.66. №11. 155150 . DOI: 10.26902/JSC_id155150

Submitted:	Aug 26, 2025
Published print:	Dec 5, 2025

Web of science:	WOS:001632315900003
Scopus:	2-s2.0-105024109734
OpenAlex:	W4417041852

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