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Petukhova Darʹya Evgenʹevna

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Articles - 6


Articles (6) More info

1 Petukhova D.E. , Vikulova E.S. , Korolkov I.V. , Khmel S.Y. , Lebedev M.S.
Growth Features and Phase Composition of Hf–Sc–O thin Films Synthesized by Atomic Layer Deposition
Journal of Structural Chemistry. 2023. V.64. N3. P.424-436. DOI: 10.1134/s0022476623030083 WOS Scopus OpenAlex
2 Petukhova D.E. , Kichay V.N. , Lebedev M.S.
The Structural and Electrical Properties of High-K Hf-Sm-O Thin Films Prepared by Atomic Layer Deposition
In compilation 2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM). 2023. – ISBN 9798350336870. DOI: 10.1109/EDM58354.2023.10225098 OpenAlex
3 Petukhova D.E. , Sartakova A.V. , Sukhikh T.S. , Afonin M.Y. , Sysoev S.V. , Vikulova E.S.
STRUCTURE AND THERMAL PROPERTIES OF TRIS-(METHYLCYCLOPENTADIENYL)SCANDIA
Journal of Structural Chemistry. 2023. V.64. P.2461-2471. DOI: 10.1134/S002247662312017X WOS Scopus РИНЦ OpenAlex
4 Ayvazyan G.Y. , Katkov M.V. , Lebedev M.S. , Shayapov V.R. , Afonin M.Y. , Petukhova D.E. , Yushina I.V. , Maksimovskii E.A. , Aghabekyan A.V.
Anti-Reflection Properties of Black Silicon Coated with Thin Films of Metal Oxides by Atomic Layer Deposition
Journal of contemporary physics /. 2021. V.56. N3. P.240-246. DOI: 10.3103/s1068337221030075 WOS Scopus OpenAlex
5 Lebedev M.S. , Khmel S.Y. , Lyulyukin M.N. , Petukhova D.E. , Barsukov A.V.
Low-temperature fabrication of SiO x -TiO 2 core-shell nanowires for photocatalytic application
Vacuum. 2019. V.165. P.51-57. DOI: 10.1016/j.vacuum.2019.03.059 WOS Scopus OpenAlex
6 Mishchenko I.B. , Petukhova D.E. , Lebedev M.S.
Research of Atomic Layer Deposited HfO2/TiO2 Multilayer Structures by Spectroscopic and Multiangle Monochromatic Null Ellipsometry
In compilation 2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM). 2018. – C.26-29. DOI: 10.1109/edm.2018.8434943 OpenAlex