Science activity
Articles (6) More info
| 1 |
Petukhova D.E.
, Vikulova E.S.
, Korolkov I.V.
, Khmel S.Y.
, Lebedev M.S.
Growth Features and Phase Composition of Hf–Sc–O thin Films Synthesized by Atomic Layer Deposition Journal of Structural Chemistry. 2023. V.64. N3. P.424-436. DOI: 10.1134/s0022476623030083 WOS Scopus OpenAlex |
| 2 |
Petukhova D.E.
, Kichay V.N.
, Lebedev M.S.
The Structural and Electrical Properties of High-K Hf-Sm-O Thin Films Prepared by Atomic Layer Deposition In compilation 2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM). 2023. – ISBN 9798350336870. DOI: 10.1109/EDM58354.2023.10225098 OpenAlex |
| 3 |
Petukhova D.E.
, Sartakova A.V.
, Sukhikh T.S.
, Afonin M.Y.
, Sysoev S.V.
, Vikulova E.S.
STRUCTURE AND THERMAL PROPERTIES OF TRIS-(METHYLCYCLOPENTADIENYL)SCANDIA Journal of Structural Chemistry. 2023. V.64. P.2461-2471. DOI: 10.1134/S002247662312017X WOS Scopus РИНЦ OpenAlex |
| 4 |
Ayvazyan G.Y.
, Katkov M.V.
, Lebedev M.S.
, Shayapov V.R.
, Afonin M.Y.
, Petukhova D.E.
, Yushina I.V.
, Maksimovskii E.A.
, Aghabekyan A.V.
Anti-Reflection Properties of Black Silicon Coated with Thin Films of Metal Oxides by Atomic Layer Deposition Journal of contemporary physics /. 2021. V.56. N3. P.240-246. DOI: 10.3103/s1068337221030075 WOS Scopus OpenAlex |
| 5 |
Lebedev M.S.
, Khmel S.Y.
, Lyulyukin M.N.
, Petukhova D.E.
, Barsukov A.V.
Low-temperature fabrication of SiO x -TiO 2 core-shell nanowires for photocatalytic application Vacuum. 2019. V.165. P.51-57. DOI: 10.1016/j.vacuum.2019.03.059 WOS Scopus OpenAlex |
| 6 |
Mishchenko I.B.
, Petukhova D.E.
, Lebedev M.S.
Research of Atomic Layer Deposited HfO2/TiO2 Multilayer Structures by Spectroscopic and Multiangle Monochromatic Null Ellipsometry In compilation 2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM). 2018. – C.26-29. DOI: 10.1109/edm.2018.8434943 OpenAlex |