Growth Characteristics, Phase Composition, and Optical Properties of Ti–Sc–O Thin Films Synthesized by Atomic Layer Deposition Full article

Journal	Russian Journal of Inorganic Chemistry ISSN: 0036-0236 , E-ISSN: 1531-8613
Output data	Year: 2025, Volume: 70, Number: 9, Pages: 1379-1390 Pages count : 12 DOI: 10.1134/S0036023625602752
Tags	atomic layer deposition, thin films, ellipsometry, X-ray diffraction, X-ray photoelectron spectroscopy
Authors	Petukhova D.E. 1 , Korolkov I.V. 1 , Saraev A.A. 2 , Lebedev M.S. 1
Affiliations	1 Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, Novosibirsk, 630090 Russia 2 Boreskov Institute of Catalysis, Siberian Branch of the Russian Academy of Sciences, Novosibirsk, 630090 Russia