
Science activity
Articles (15) More info
1 |
Khizhnyak E.A.
, Shayapov V.R.
, Korolkov I.V.
, Dudkina S.P.
, Geydt P.V.
, Lebedev M.S.
EFFECT OF DEPOSITION AND ANNEALING TEMPERATURES ON THE PHASE COMPOSITION OF TiO2 FILMS OBTAINED BY ATOMIC LAYER DEPOSITION FROM TITANIUM TETRACHLORIDE AND WATER Journal of Structural Chemistry. 2025. V.66. N2. P.293-303. DOI: 10.1134/S0022476625020088 WOS OpenAlex |
2 |
Peschenyuk Y.A.
, Semenov A.A.
, Ayvazyan G.Y.
, Lebedev M.S.
, Gatapova E.Y.
Bubble growth in a volatile liquid drop: interface dynamics Thermophysics and Aeromechanics. 2023. V.29. N6. P.965-973. DOI: 10.1134/s0869864322060178 WOS Scopus OpenAlex |
3 |
Petukhova D.E.
, Vikulova E.S.
, Korolkov I.V.
, Khmel S.Y.
, Lebedev M.S.
Growth Features and Phase Composition of Hf–Sc–O thin Films Synthesized by Atomic Layer Deposition Journal of Structural Chemistry. 2023. V.64. N3. P.424-436. DOI: 10.1134/s0022476623030083 WOS Scopus OpenAlex |
4 |
Petukhova D.E.
, Kichay V.N.
, Lebedev M.S.
The Structural and Electrical Properties of High-K Hf-Sm-O Thin Films Prepared by Atomic Layer Deposition In compilation 2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM). 2023. – ISBN 9798350336870. DOI: 10.1109/EDM58354.2023.10225098 OpenAlex |
5 |
Lee L.
, Chiang C-H.
, Shen Y-C.
, Wu S-C.
, Shih Y-C.
, Yang T-Y.
, Hsu Y-C.
, Cyu R-H.
, Yu Y-J.
, Hsieh S-H.
, Chen C-H.
, Lebedev M.
, Chueh Y-L.
Rational Design on Polymorphous Phase Switching in Molybdenum Diselenide-Based Memristor Assisted by All-Solid-State Reversible Intercalation toward Neuromorphic Application ACS Nano. 2023. V.17. N1. P.84-93. DOI: 10.1021/acsnano.2c04356 WOS Scopus РИНЦ OpenAlex |
6 |
Ayvazyan G.Y.
, Kovalenko D.L.
, Lebedev M.S.
, Matevosyan L.A.
, Semchenko A.V.
Investigation of the Structural and Optical Properties of Silicon-Perovskite Structures with a Black Silicon Layer Journal of contemporary physics /. 2022. V.57. N3. P.274-279. DOI: 10.1134/s1068337222030069 WOS Scopus OpenAlex |
7 |
Ayvazyan G.Y.
, Katkov M.V.
, Lebedev M.S.
, Shayapov V.R.
, Afonin M.Y.
, Petukhova D.E.
, Yushina I.V.
, Maksimovskii E.A.
, Aghabekyan A.V.
Anti-Reflection Properties of Black Silicon Coated with Thin Films of Metal Oxides by Atomic Layer Deposition Journal of contemporary physics /. 2021. V.56. N3. P.240-246. DOI: 10.3103/s1068337221030075 WOS Scopus OpenAlex |
8 |
Ayvazyan G.Y.
, Aghabekyan A.V.
, Hakhoyan L.A.
, Katkov M.V.
, Lebedev M.S.
Passivation Properties of Atomic-Layer-Deposited Hafnium Oxide on Black Silicon Surface In compilation 2021 IEEE 32nd International Conference on Microelectronics, MIEL 2021 - Proceedings". – Institute of Electrical and Electronics Engineers Inc.., 2021. – C.145-147. – ISBN 978-1-6654-4528-3. DOI: 10.1109/miel52794.2021.9569183 OpenAlex |
9 |
Ayvazyan K.G.
, Katkov M.V.
, Lebedev M.S.
, Ayvazyan G.Y.
Enhanced Light-trapping with Conformal ALD Coating of Black Silicon by High-k Metal Oxides In compilation Proceedings of the 2021 IEEE 11th International Conference "Nanomaterials: Applications and Properties", NAP 2021. – Institute of Electrical and Electronics Engineers Inc.., 2021. – ISBN 978-1-6654-3907-7. DOI: 10.1109/nap51885.2021.9568530 OpenAlex |
10 |
Katkov M.V.
, Ayvazyan G.Y.
, Shayapov V.R.
, Lebedev M.S.
Modeling of the Optical Properties of Black Silicon Passivated by Thin Films of Metal Oxides Journal of contemporary physics /. 2020. V.55. N1. P.16-22. DOI: 10.3103/s106833722001003x WOS Scopus OpenAlex |
11 |
Lebedev M.S.
, Khmel S.Y.
, Lyulyukin M.N.
, Petukhova D.E.
, Barsukov A.V.
Low-temperature fabrication of SiO x -TiO 2 core-shell nanowires for photocatalytic application Vacuum. 2019. V.165. P.51-57. DOI: 10.1016/j.vacuum.2019.03.059 WOS Scopus OpenAlex |
12 |
Lebedev M.S.
, Kruchinin V.N.
, Afonin M.Y.
, Korolkov I.V.
, Saraev A.A.
, Gismatulin A.A.
, Gritsenko V.A.
Optical properties and charge transport of textured Sc2O3 thin films obtained by atomic layer deposition Applied Surface Science. 2019. V.478. P.690-698. DOI: 10.1016/j.apsusc.2019.01.288 WOS Scopus OpenAlex |
13 |
Atuchin V.V.
, Lebedev M.S.
, Korolkov I.V.
, Kruchinin V.N.
, Maksimovskii E.A.
, Trubin S.V.
Composition-sensitive growth kinetics and dispersive optical properties of thin HfxTi1−xO2 (0 ≤ x ≤ 1) films prepared by the ALD method Journal of Materials Science: Materials in Electronics. 2019. V.30. N1. P.812-823. DOI: 10.1007/s10854-018-0351-z WOS Scopus OpenAlex |
14 |
Mishchenko I.B.
, Petukhova D.E.
, Lebedev M.S.
Research of Atomic Layer Deposited HfO2/TiO2 Multilayer Structures by Spectroscopic and Multiangle Monochromatic Null Ellipsometry In compilation 2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM). 2018. – C.26-29. DOI: 10.1109/edm.2018.8434943 OpenAlex |
15 |
Shayapov V.R.
, Lebedev M.S.
Optical study of wedge-shaped films. Part II. Experiments Journal of Optical Technology. 2016. V.83. N7. P.447-451. DOI: 10.1364/JOT.83.000447 WOS Scopus РИНЦ OpenAlex |