Optical properties and charge transport of textured Sc2O3 thin films obtained by atomic layer deposition

Optical properties and charge transport of textured Sc2O3 thin films obtained by atomic layer deposition Full article

Journal

Applied Surface Science
ISSN: 1873-5584 , E-ISSN: 0169-4332

Output data

Year: 2019, Volume: 478, Pages: 690-698 Pages count : 9 DOI: 10.1016/j.apsusc.2019.01.288

Authors

Lebedev M.S. ¹ , Kruchinin V.N. ² , Afonin M.Yu. ¹ , Korolkov I.V. ^1,4 , Saraev A.A. ^4,3 , Gismatulin A.A. ² , Gritsenko V.A. ^5,4,2

Affiliations

1	Nikolaev Institute of Inorganic Chemistry SB RAS, 3 Ac. Lavrentyev Ave., 630090 Novosibirsk, Russia
2	Rzhanov Institute of Semiconductor Physics SB RAS, 13 Ac. Lavrentyev Ave, 630090 Novosibirsk, Russia
3	Boreskov Institute of Catalysis SB RAS, 5 Ac. Lavrentyev Ave., 630090 Novosibirsk, Russia
4	Novosibirsk State University, 2 Pirogov Str., 630090 Novosibirsk, Russia
5	Novosibirsk State Technical University, 20 Marx Ave., 630073 Novosibirsk, Russia

Lebedev M.S. , Kruchinin V.N. , Afonin M.Y. , Korolkov I.V. , Saraev A.A. , Gismatulin A.A. , Gritsenko V.A.
Optical properties and charge transport of textured Sc2O3 thin films obtained by atomic layer deposition
Applied Surface Science. 2019. V.478. P.690-698. DOI: 10.1016/j.apsusc.2019.01.288 WOS Scopus OpenAlex

Submitted:	Dec 27, 2018
Accepted:	Jan 30, 2019
Published online:	Jan 31, 2019

Web of science:	WOS:000461150400081
Scopus:	2-s2.0-85061210277
OpenAlex:	W2911682364

DB	Citing
OpenAlex	19
Scopus	15
Web of science	15