Optical properties and charge transport of textured Sc2O3 thin films obtained by atomic layer deposition

Optical properties and charge transport of textured Sc2O3 thin films obtained by atomic layer deposition Научная публикация

Журнал

Applied Surface Science
ISSN: 1873-5584 , E-ISSN: 0169-4332

Вых. Данные

Год: 2019, Том: 478, Страницы: 690-698 Страниц : 9 DOI: 10.1016/j.apsusc.2019.01.288

Авторы

Lebedev M.S. ¹ , Kruchinin V.N. ² , Afonin M.Yu. ¹ , Korolkov I.V. ^1,4 , Saraev A.A. ^4,3 , Gismatulin A.A. ² , Gritsenko V.A. ^5,4,2

Организации

1	Nikolaev Institute of Inorganic Chemistry SB RAS, 3 Ac. Lavrentyev Ave., 630090 Novosibirsk, Russia
2	Rzhanov Institute of Semiconductor Physics SB RAS, 13 Ac. Lavrentyev Ave, 630090 Novosibirsk, Russia
3	Boreskov Institute of Catalysis SB RAS, 5 Ac. Lavrentyev Ave., 630090 Novosibirsk, Russia
4	Novosibirsk State University, 2 Pirogov Str., 630090 Novosibirsk, Russia
5	Novosibirsk State Technical University, 20 Marx Ave., 630073 Novosibirsk, Russia

Lebedev M.S. , Kruchinin V.N. , Afonin M.Y. , Korolkov I.V. , Saraev A.A. , Gismatulin A.A. , Gritsenko V.A.
Optical properties and charge transport of textured Sc2O3 thin films obtained by atomic layer deposition
Applied Surface Science. 2019. V.478. P.690-698. DOI: 10.1016/j.apsusc.2019.01.288 WOS Scopus OpenAlex

Поступила в редакцию:	27 дек. 2018 г.
Принята к публикации:	30 янв. 2019 г.
Опубликована online:	31 янв. 2019 г.

Web of science:	WOS:000461150400081
Scopus:	2-s2.0-85061210277
OpenAlex:	W2911682364

БД	Цитирований
OpenAlex	19
Scopus	15
Web of science	15