Chemical and Phase Composition, and Optical Properties of Zirconium-Titanium Oxide Coatings Synthesized by Atomic Layer Deposition

Chemical and Phase Composition, and Optical Properties of Zirconium-Titanium Oxide Coatings Synthesized by Atomic Layer Deposition Full article

Journal

Russian Journal of Inorganic Chemistry
ISSN: 0036-0236 , E-ISSN: 1531-8613

Output data

Year: 2026, Volume: 71, Number: 3, Pages: 409-422 Pages count : 14 DOI: 10.1134/s0036023626600280

Authors

Lebedev M.S. ¹ , Asanov I.P. ¹ , Korolkov I.V. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, 630090, Novosibirsk, Russia

Funding (2)

1		FWUZ-2025-0004
2	Ministry of Science and Higher Education of the Russian Federation	121031700313-8

Lebedev M.S. , Asanov I.P. , Korolkov I.V.
Chemical and Phase Composition, and Optical Properties of Zirconium-Titanium Oxide Coatings Synthesized by Atomic Layer Deposition
Russian Journal of Inorganic Chemistry. 2026. V.71. N3. P.409-422. DOI: 10.1134/s0036023626600280 OpenAlex

Лебедев М.С. , Асанов И.П. , Корольков И.В.
Химический и фазовый состав покрытий на основе оксидов циркония и титана, синтезированных методом молекулярного наслаивания, и их оптические свойства
Журнал неорганической химии. 2026. Т.71. №3. С.440-454. DOI: 10.7868/S3034560X26030102

Submitted:	Nov 28, 2025
Published print:	May 25, 2026

≡ OpenAlex:

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