EFFECT OF DEPOSITION AND ANNEALING TEMPERATURES ON THE PHASE COMPOSITION OF TiO2 FILMS OBTAINED BY ATOMIC LAYER DEPOSITION FROM TITANIUM TETRACHLORIDE AND WATER

EFFECT OF DEPOSITION AND ANNEALING TEMPERATURES ON THE PHASE COMPOSITION OF TiO2 FILMS OBTAINED BY ATOMIC LAYER DEPOSITION FROM TITANIUM TETRACHLORIDE AND WATER Full article

Journal

Journal of Structural Chemistry
ISSN: 1573-8779 , E-ISSN: 0022-4766

Output data

Year: 2025, Volume: 66, Number: 2, Pages: 293-303 Pages count : 11 DOI: 10.1134/S0022476625020088

Tags

titanium dioxide, atomic layer deposition, thin films, annealing, anatase, rutile.

Authors

Khizhnyak E.A. ¹ , Shayapov V.R. ¹ , Korolkov I.V. ¹ , Dudkina S.P. ¹ , Geydt P.V. ² , Lebedev M.S. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences
2	Novosibirsk State University, Novosibirsk

Titanium dioxide TiO2 films are obtained from titanium tetrachloride and water by atomic layer deposition. A change in the phase composition of the films is found when the deposition and annealing temperatures are varied. At a deposition temperature of 150 °C amorphous films are formed; at 200-400 °C films containing the anatase phase are formed; a mixture of anatase and rutile phases is formed in high temperature films (deposition temperatures of 450 °C and 500 °C). Annealing of high-temperature films at 400 °C and 500 °C increases the relative intensity of rutile reflections. The film morphology is analyzed by scanning electron and atomic force microscopy techniques. As the deposition temperature increases, grains enlarge on the film surface.

Khizhnyak E.A. , Shayapov V.R. , Korolkov I.V. , Dudkina S.P. , Geydt P.V. , Lebedev M.S.
EFFECT OF DEPOSITION AND ANNEALING TEMPERATURES ON THE PHASE COMPOSITION OF TiO2 FILMS OBTAINED BY ATOMIC LAYER DEPOSITION FROM TITANIUM TETRACHLORIDE AND WATER
Journal of Structural Chemistry. 2025. V.66. N2. P.293-303. DOI: 10.1134/S0022476625020088 WOS OpenAlex

Хижняк Е.А. , Шаяпов В.Р. , Корольков И.В. , Дудкина С.П. , Гейдт П.В. , Лебедев М.С.
ВЛИЯНИЕ ТЕМПЕРАТУР ОСАЖДЕНИЯ И ОТЖИГА НА ФАЗОВЫЙ СОСТАВ ПЛЕНОК TiO2, ПОЛУЧЕННЫХ МЕТОДОМ АТОМНО-СЛОЕВОГО ОСАЖДЕНИЯ ИЗ ТЕТРАХЛОРИДА ТИТАНА И ВОДЫ
Журнал структурной химии. 2025. Т.66. №2. 140578 :1-12. DOI: 10.26902/JSC_id140578 OpenAlex

Web of science:	WOS:001441528700007
OpenAlex:	W4408275877

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