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Articles (2) More info
1 |
Khizhnyak E.A.
, Shayapov V.R.
, Korolkov I.V.
, Dudkina S.P.
, Geydt P.V.
, Lebedev M.S.
EFFECT OF DEPOSITION AND ANNEALING TEMPERATURES ON THE PHASE COMPOSITION OF TiO2 FILMS OBTAINED BY ATOMIC LAYER DEPOSITION FROM TITANIUM TETRACHLORIDE AND WATER Journal of Structural Chemistry. 2025. V.66. N2. P.293-303. DOI: 10.1134/S0022476625020088 WOS OpenAlex |
2 |
Ermakova E.N.
, Maksimovsky E.A.
, Fedorenko A.D.
, Shapovalova A.A.
, Khizhnyak E.A.
, Kosinova M.L.
Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia Journal of Structural Chemistry. 2024. V.65. N8. P.1488-1501. DOI: 10.1134/s002247662408002x WOS Scopus РИНЦ OpenAlex |