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Ermakova E.N. , Maksimovsky E.A. , Fedorenko A.D. , Shapovalova A.A. , Khizhnyak E.A. , Kosinova M.L. Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia Journal of Structural Chemistry. 2024. V.65. N8. P.1488-1501. DOI: 10.1134/s002247662408002x WOS Scopus РИНЦ OpenAlex