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Khizhnyak Evgenii Aleksandrovich

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Articles - 3


Articles (3) More info

1 Khizhnyak E.A. , Shayapov V.R. , Korolkov I.V. , Dudkina S.P. , Geydt P.V. , Lebedev M.S.
EFFECT OF DEPOSITION AND ANNEALING TEMPERATURES ON THE PHASE COMPOSITION OF TiO2 FILMS OBTAINED BY ATOMIC LAYER DEPOSITION FROM TITANIUM TETRACHLORIDE AND WATER
Journal of Structural Chemistry. 2025. V.66. N2. P.293-303. DOI: 10.1134/S0022476625020088 WOS OpenAlex
2 Evgeny Khizhnyak , Vladimir Shayapov , Irina Yushina , Mikhail Lebedev
Optical Properties of Hf-Ti-O Films Obtained by Atomic Layer Deposition
In compilation 2025 IEEE 26th International Con-ference of Young Professionals in Electron Devices and Materials (EDM) 27 июня - 1 июля 2025. – IEEE Xplore., 2025. DOI: 10.1109/EDM65517.2025.11096808
3 Ermakova E.N. , Maksimovsky E.A. , Fedorenko A.D. , Shapovalova A.A. , Khizhnyak E.A. , Kosinova M.L.
Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia
Journal of Structural Chemistry. 2024. V.65. N8. P.1488-1501. DOI: 10.1134/s002247662408002x WOS Scopus РИНЦ OpenAlex