Synthesis and Analysis of SiBCN Films Obtained by Plasma-Enhanced Chemical Vapor Deposition from Triethylaminoborane, Hexamethyldisilazane, and Ammonia Full article

Journal	Journal of Structural Chemistry ISSN: 1573-8779 , E-ISSN: 0022-4766
Output data	Year: 2024, Volume: 65, Number: 8, Pages: 1488-1501 Pages count : 14 DOI: 10.1134/s002247662408002x
Authors	Ermakova E.N. 1 , Maksimovsky E.A. 1 , Fedorenko A.D. 1 , Shapovalova A.A. 1 , Khizhnyak E.A. 1 , Kosinova M.L. 1
Affiliations	1 Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia