Growth Features and Phase Composition of Hf–Sc–O thin Films Synthesized by Atomic Layer Deposition Full article

Journal	Journal of Structural Chemistry ISSN: 1573-8779 , E-ISSN: 0022-4766
Output data	Year: 2023, Volume: 64, Number: 3, Pages: 424-436 Pages count : 13 DOI: 10.1134/s0022476623030083
Authors	Petukhova D.E. 1 , Vikulova E.S. 1 , Korolkov I.V. 1 , Khmel S.Ya. 2 , Lebedev M.S. 1
Affiliations	1 Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia 2 Kutateladze Institute of Thermal Physics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, Russia

Funding (2)

1	Ministry of Science and Higher Education of the Russian Federation	121031700314-5
2	Ministry of Science and Higher Education of the Russian Federation	121031700313-8