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Articles (9) More info
1 |
Belaya S.V.
, Maksimovsky E.A.
, Shayapov V.R.
, Shapovalova A.A.
, Kolodin A.N.
, Saraev A.A.
, Asanov I.P.
, Khomyakov M.N.
, Yushina I.V.
, Plekhanov A.G.
, Sulyaeva V.S.
, Kosinova M.L.
Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization Applied sciences. 2023. V.13. N8. 4959 :1-27. DOI: 10.3390/app13084959 WOS Scopus РИНЦ OpenAlex |
2 |
Plekhanov A.G.
, Maksimovskiy E.A.
, Kriventsov V.V.
, Korolkov I.V.
, Saraev A.A.
, Lavrov A.N.
, Grebenkina M.A.
, Kolodin A.N.
, Trunova V.A.
Composition, structure, and magnetic properties of SiCxNyFez films produced by the PECVD method from a gas mixture of 1,1,1,3,3,3-hexamethyldisilazane, ferrocene, and helium Colloids and Surfaces A: Physicochemical and Engineering Aspects. 2022. V.655. P.130333. DOI: 10.1016/j.colsurfa.2022.130333 WOS Scopus OpenAlex |
3 |
Fainer N.I.
, Plekhanov A.G.
, Pushkarev R.V.
, Shayapov V.R.
, Maksimovskiy E.A.
, Nadolinny V.A.
, Korotaev E.V.
, Kaichev V.V.
SYNTHESIS OF MAGNETIC NANOCOMPOSITE FILMS SiCxNyFez BY PLASMA-ENHANCED CHEMICAL DECOMPOSITION OF A GASEOUS MIXTURE OF 1,1,1,3,3,3-HEXAMETHYLDISILAZANE, FERROCENE, AND HELIUM Journal of Structural Chemistry. 2020. V.61. P.1865–1875. DOI: 10.1134/S0022476620120045 WOS Scopus РИНЦ OpenAlex |
4 |
Plekhanov A.G.
, Fainer N.I.
, Maksimovskiy E.A.
, Shayapov V.R.
, Yushina I.V.
, Khomyakov M.N.
Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture Russian Journal of General Chemistry. 2019. V.89. N11. P.2290-2294. DOI: 10.1134/S1070363219110203 Scopus OpenAlex |
5 |
Суляева В.С.
, Плеханов А.Г.
, Максимовский Е.А.
, Файнер Н.И.
, Румянцев Ю.М.
, Косинова М.Л.
Характеризация тонких пленок карбонитридов бора и кремния методом волнодисперсионной спектроскопии Физикохимия поверхности и защита материалов. 2017. V.53. N6. P.662-666. DOI: 10.7868/s0044185617060225 РИНЦ OpenAlex |
6 |
Sulyaeva V.S.
, Plekhanov A.G.
, Maksimovskii E.A.
, Fainer N.I.
, Rumyantsev Y.M.
, Kosinova M.L.
Characterization of Thin Boron and Silicon Carbonitride Films by Wavelength Dispersive Spectroscopy Protection of Metals and Physical Chemistry of Surfaces. 2017. V.53. N6. P.1187–1191. DOI: 10.1134/S2070205117060211 WOS Scopus РИНЦ OpenAlex |
7 |
Fainer N.I.
, Plekhanov A.G.
, Golubenko A.N.
, Rumyantsev Y.M.
, Maksimovskii E.A.
, Shayapov V.R.
STRUCTURE AND ELEMENTAL COMPOSITION OF TRANSPARENT NANOCOMPOSITE SILICON OXYCARBONITRIDE FILMS Journal of Structural Chemistry. 2017. V.58. N1. P.119-125. DOI: 10.1134/S0022476617010188 Scopus OpenAlex |
8 |
Fainer N.I.
, Plekhanov A.G.
, Rumyantsev Y.M.
, Maximovskii E.A.
, Shayapov V.R.
Films of Hydrogenated Silicon Oxycarbonitride. Part I. Chemical and Phase Composition Glass Physics and Chemistry. 2014. V.40. N5. P.570-577. DOI: 10.1134/S1087659614050034 WOS Scopus РИНЦ OpenAlex |
9 |
Fainer N.I.
, Plekhanov A.G.
, Rumyantsev Y.M.
, Yushina I.V.
, Shayapov V.R.
, Kichai V.N.
Hydrogenated silicon oxycarbonitride films. Part II. Physicochemical and functional properties Glass Physics and Chemistry. 2014. V.40. N6. P.643-649. DOI: 10.1134/S1087659614060042 WOS Scopus РИНЦ OpenAlex |