Films of Hydrogenated Silicon Oxycarbonitride. Part I. Chemical and Phase Composition

Films of Hydrogenated Silicon Oxycarbonitride. Part I. Chemical and Phase Composition Full article

Journal

Glass Physics and Chemistry
ISSN: 1608-313X , E-ISSN: 1087-6596

Output data

Year: 2014, Volume: 40, Number: 5, Pages: 570-577 Pages count : 8 DOI: 10.1134/S1087659614050034

Authors

Fainer N.I. ¹ , Plekhanov A.G. ¹ , Rumyantsev Yu.M. ¹ , Maximovskii E.A. ¹ , Shayapov V.R. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences

Fainer N.I. , Plekhanov A.G. , Rumyantsev Y.M. , Maximovskii E.A. , Shayapov V.R.
Films of Hydrogenated Silicon Oxycarbonitride. Part I. Chemical and Phase Composition
Glass Physics and Chemistry. 2014. V.40. N5. P.570-577. DOI: 10.1134/S1087659614050034 WOS Scopus РИНЦ OpenAlex

Файнер Н.И. , Плеханов А.Г. , Румянцев Ю.М. , Максимовский Е.А. , Шаяпов В.Р.
Пленки гидрогенизированного оксикарбонитрида кремния. Часть I. Химический и фазовый состав
Физика и химия стекла. 2014. Т.40. №5. С.749-758. РИНЦ

Submitted:

Nov 22, 2013

Web of science:	WOS:000343722600013
Scopus:	2-s2.0-84911972972
Elibrary:	24007152
OpenAlex:	W2052587423

DB	Citing
OpenAlex	9
Scopus	9
Web of science	8
Elibrary	9