Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization

Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization Full article

Journal

Applied sciences
ISSN: 2076-3417

Output data

Year: 2023, Volume: 13, Number: 8, Article number : 4959, Pages count : 27 DOI: 10.3390/app13084959

Authors

Belaya Svetlana V. ¹ , Maksimovsky Eugene A. ¹ , Shayapov Vladimir R. ¹ , Shapovalova Aleksandra A. ¹ , Kolodin Alexey N. ¹ , Saraev Andrey A. ² , Asanov Igor P. ¹ , Khomyakov Maxim N. ³ , Yushina Irina V. ¹ , Plekhanov Aleksandr G. ¹ , Sulyaeva Veronica S. ¹ , Kosinova Marina L. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry SB RAS, 3, Acad. Lavrentiev Ave., Novosibirsk 630090, Russia
2	Boreskov Institute of Catalysis SB RAS, 5, Acad. Lavrentiev Ave., Novosibirsk 630090, Russia
3	Institute of Laser Physics SB RAS, 15B, Acad. Lavrentiev Ave., Novosibirsk 630090, Russia

Funding (1)

Ministry of Science and Higher Education of the Russian Federation

121031700314-5

Belaya S.V. , Maksimovsky E.A. , Shayapov V.R. , Shapovalova A.A. , Kolodin A.N. , Saraev A.A. , Asanov I.P. , Khomyakov M.N. , Yushina I.V. , Plekhanov A.G. , Sulyaeva V.S. , Kosinova M.L.
Boron Carbonitride Films with Tunable Composition: LPCVD and PECVD Synthesis Using Trimethylamine Borane and Nitrogen Mixture and Characterization
Applied sciences. 2023. V.13. N8. 4959 :1-27. DOI: 10.3390/app13084959 WOS Scopus РИНЦ OpenAlex

Submitted:	Mar 10, 2023
Published print:	Apr 14, 2023

Web of science:	WOS:000977755200001
Scopus:	2-s2.0-85156172523
Elibrary:	54387378
OpenAlex:	W4365509100

DB	Citing
OpenAlex	6
Web of science	6
Scopus	2
Elibrary	4