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Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture Full article

Journal Russian Journal of General Chemistry
ISSN: 1070-3632 , E-ISSN: 1608-3350
Output data Year: 2019, Volume: 89, Number: 11, Pages: 2290-2294 Pages count : 5 DOI: 10.1134/S1070363219110203
Tags hydrogenated silicon oxycarbonitride fi lms, hexamethylcyclotrisilazane, plasma-chemical deposition, optical transmission, hardness, Young’s modulus
Authors Plekhanov A.G. 1 , Fainer N.I. 1 , Maksimovskiy E.A. 1 , Shayapov V.R. 1 , Yushina I.V. 1 , Khomyakov M.N. 2
Affiliations
1 A.V. Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences
2 Institute of Laser Physics, Siberian Branch of the Russian Academy of Sciences

Abstract: Synthesis of silicon oxycarbonitride fi lms highly transparent over a wide spectral region (350–2500 nm) has been developed. The fi lms have been deposited during decomposition of 1,1,3,3,5,5-hexamethylcyclotrisilazane in mixtures with oxygen and nitrogen in a high-frequency discharge plasma in the temperature range of 373–973 K. The infl uence of the synthesis temperature and the oxygen to nitrogen ratio in the initial gas mixtures on chemical and functional properties of SiCxNyOz:H fi lms has been studied using IR and Raman spectroscopy, energy-dispersive spectroscopy, ellipsometry, and spectrophotometry. The composition and selected characteristics of the obtained fi lms have been investigated.
Cite: Plekhanov A.G. , Fainer N.I. , Maksimovskiy E.A. , Shayapov V.R. , Yushina I.V. , Khomyakov M.N.
Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture
Russian Journal of General Chemistry. 2019. V.89. N11. P.2290-2294. DOI: 10.1134/S1070363219110203 WOS Scopus OpenAlex
Original: Плеханов А.Г. , Файнер Н.И. , Максимовский Е.А. , Шаяпов В.Р. , Юшина И.В. , Хомяков М.Н.
ПОЛУЧЕНИЕ ВЫСОКОПРОЗРАЧНЫХ ПЛЕНОК SiCxNyOz:H ПЛАЗМОХИМИЧЕСКИМ РАЗЛОЖЕНИЕМ ГАЗОВОЙ СМЕСИ 1,1,3,3,5,5-ГЕКСАМЕТИЛЦИКЛОТРИСИЛАЗАНА, КИСЛОРОДА И АЗОТА
Журнал общей химии. 2019. Т.89. №11. С.1786-1791. DOI: 10.1134/S0044460X19110209 РИНЦ OpenAlex
Dates:
Submitted: May 14, 2019
Accepted: May 20, 2019
Identifiers:
Web of science: WOS:000511198000020
Scopus: 2-s2.0-85077393969
OpenAlex: W2997533186
Citing: Пока нет цитирований
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