Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture

Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture Научная публикация

Журнал

Russian Journal of General Chemistry
ISSN: 1070-3632 , E-ISSN: 1608-3350

Вых. Данные

Год: 2019, Том: 89, Номер: 11, Страницы: 2290-2294 Страниц : 5 DOI: 10.1134/S1070363219110203

Ключевые слова

hydrogenated silicon oxycarbonitride fi lms, hexamethylcyclotrisilazane, plasma-chemical deposition, optical transmission, hardness, Young’s modulus

Авторы

Plekhanov A.G. ¹ , Fainer N.I. ¹ , Maksimovskiy E.A. ¹ , Shayapov V.R. ¹ , Yushina I.V. ¹ , Khomyakov M.N. ²

Организации

1	A.V. Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences
2	Institute of Laser Physics, Siberian Branch of the Russian Academy of Sciences

Synthesis of silicon oxycarbonitride fi lms highly transparent over a wide spectral region (350–2500 nm) has been developed. The fi lms have been deposited during decomposition of 1,1,3,3,5,5-hexamethylcyclotrisilazane in mixtures with oxygen and nitrogen in a high-frequency discharge plasma in the temperature range of 373–973 K. The infl uence of the synthesis temperature and the oxygen to nitrogen ratio in the initial gas mixtures on chemical and functional properties of SiCxNyOz:H fi lms has been studied using IR and Raman spectroscopy, energy-dispersive spectroscopy, ellipsometry, and spectrophotometry. The composition and selected characteristics of the obtained fi lms have been investigated.

Plekhanov A.G. , Fainer N.I. , Maksimovskiy E.A. , Shayapov V.R. , Yushina I.V. , Khomyakov M.N.
Synthesis of Highly Transparent SiCxNyOz:H Films via Plasma-Chemical Decomposition of 1,1,3,3,5,5-Hexamethylcyclotrisilazane, Oxygen, and Nitrogen Gas Mixture
Russian Journal of General Chemistry. 2019. V.89. N11. P.2290-2294. DOI: 10.1134/S1070363219110203 Scopus OpenAlex

Плеханов А.Г. , Файнер Н.И. , Максимовский Е.А. , Шаяпов В.Р. , Юшина И.В. , Хомяков М.Н.
ПОЛУЧЕНИЕ ВЫСОКОПРОЗРАЧНЫХ ПЛЕНОК SiCxNyOz:H ПЛАЗМОХИМИЧЕСКИМ РАЗЛОЖЕНИЕМ ГАЗОВОЙ СМЕСИ 1,1,3,3,5,5-ГЕКСАМЕТИЛЦИКЛОТРИСИЛАЗАНА, КИСЛОРОДА И АЗОТА
Журнал общей химии. 2019. Т.89. №11. С.1786-1791. DOI: 10.1134/S0044460X19110209 РИНЦ OpenAlex

Поступила в редакцию:	14 мая 2019 г.
Принята к публикации:	20 мая 2019 г.

Scopus:	2-s2.0-85077393969
OpenAlex:	W2997533186

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