Characterization of Thin Boron and Silicon Carbonitride Films by Wavelength Dispersive Spectroscopy

Characterization of Thin Boron and Silicon Carbonitride Films by Wavelength Dispersive Spectroscopy Full article

Journal

Protection of Metals and Physical Chemistry of Surfaces
ISSN: 2070-206X , E-ISSN: 2070-2051

Output data

Year: 2017, Volume: 53, Number: 6, Pages: 1187–1191 Pages count : DOI: 10.1134/S2070205117060211

Authors

Sulyaeva V.S. ¹ , Plekhanov A.G. ¹ , Maksimovskii E.A. ¹ , Fainer N.I. ¹ , Rumyantsev Yu.M. ¹ , Kosinova M.L. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090 Russia

Sulyaeva V.S. , Plekhanov A.G. , Maksimovskii E.A. , Fainer N.I. , Rumyantsev Y.M. , Kosinova M.L.
Characterization of Thin Boron and Silicon Carbonitride Films by Wavelength Dispersive Spectroscopy
Protection of Metals and Physical Chemistry of Surfaces. 2017. V.53. N6. P.1187–1191. DOI: 10.1134/S2070205117060211 WOS Scopus РИНЦ OpenAlex

Суляева В.С. , Плеханов А.Г. , Максимовский Е.А. , Файнер Н.И. , Румянцев Ю.М. , Косинова М.Л.
Характеризация тонких пленок карбонитридов бора и кремния методом волнодисперсионной спектроскопии
Физикохимия поверхности и защита материалов. 2017. V.53. N6. P.662-666. DOI: 10.7868/s0044185617060225 РИНЦ OpenAlex

Submitted:	Jul 4, 2016
Published print:	Jun 1, 2017

Web of science:	WOS:000427652800031
Scopus:	2-s2.0-85044019001
Elibrary:	35535315
OpenAlex:	W2793023087

DB	Citing
OpenAlex	6
Web of science	6
Scopus	6
Elibrary	5