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1,4-Bis(trimethylsilyl)piperazine—Thermal Properties and Application as CVD Precursor Full article

Journal Coatings
ISSN: 2079-6412
Output data Year: 2023, Volume: 13, Number: 6, Article number : 1045, Pages count : 23 DOI: 10.3390/coatings13061045
Authors Ermakova Evgeniya 1 , Sysoev Sergey 2 , Tsyrendorzhieva Irina 3 , Mareev Alexander 3 , Maslova Olga 1 , Shayapov Vladimir 1 , Maksimovskiy Eugene 1 , Yushina Irina 1 , Kosinova Marina 1
Affiliations
1 Laboratory of Functional Films and Coatings, Nikolaev Institute of Inorganic Chemistry, SB RAS, Novosibirsk 630090, Russia
2 Laboratory of Thermodynamics of Inorganic Materials, Nikolaev Institute of Inorganic Chemistry, SB RAS, Novosibirsk 630090, Russia
3 Laboratory of Medical and Pharmaceutical Chemistry, A.E. Favorsky Irkutsk Institute of Chemistry, SB RAS, Irkutsk 664033, Russia

Funding (2)

1 Russian Science Foundation 23-79-00026
2 Ministry of Science and Higher Education of the Russian Federation
Cite: Ermakova E. , Sysoev S. , Tsyrendorzhieva I. , Mareev A. , Maslova O. , Shayapov V. , Maksimovskiy E. , Yushina I. , Kosinova M.
1,4-Bis(trimethylsilyl)piperazine—Thermal Properties and Application as CVD Precursor
Coatings. 2023. V.13. N6. 1045 :1-23. DOI: 10.3390/coatings13061045 WOS Scopus OpenAlex
Dates:
Submitted: May 18, 2023
Published print: Jun 5, 2023
Identifiers:
Web of science: WOS:001014206200001
Scopus: 2-s2.0-85164114863
OpenAlex: W4379468614
Citing:
DB Citing
OpenAlex 2
Web of science 3
Scopus 3
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