Organosilicon compounds as single-source precursors for SiCN films production Full article

Journal	Journal of Organometallic Chemistry ISSN: 1872-8561 , E-ISSN: 0022-328X
Output data	Year: 2022, Volume: 958, Article number : 122183, Pages count : 28 DOI: 10.1016/j.jorganchem.2021.122183
Authors	Ermakova Е. 1 , Kosinova M. 1
Affiliations	1 Nikolaev Institute of Inorganic Chemistry, Siberian Branch of the Russian Academy of Sciences, 3, Acad. Lavrentiev Ave., Novosibirsk, 630090, Russia

Funding (1)

1

Ministry of Science and Higher Education of the Russian Federation

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