Synthesis of Tris(allylamino)ethylsilane, Tetrakis(allylamino)silane, and Silicon Carbonitride Films Based Thereon by Gas-Phase Processes

Synthesis of Tris(allylamino)ethylsilane, Tetrakis(allylamino)silane, and Silicon Carbonitride Films Based Thereon by Gas-Phase Processes Full article

Journal

Russian Journal of Organic Chemistry
ISSN: 1608-3393 , E-ISSN: 1070-4280

Output data

Year: 2026, Volume: 62, Number: 6, Article number : 126, Pages count : 8 DOI: 10.1134/s1070428026600841

Authors

Ermakova E.N. ¹ , Sysoev S.V. ¹ , Tsyrendorzhieva I.P. ² , Mareev A.V. ^2,3 , Fedorenko A.D. ¹ , Shayapov V.R. ¹ , Kosinova M.L. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia
2	Favorsky Irkutsk Institute of Chemistry, Siberian Branch, Russian Academy of Sciences, 664033, Irkutsk, Russia
3	Irkutsk State University, 664003, Irkutsk, Russia

Funding (1)

Ermakova E.N. , Sysoev S.V. , Tsyrendorzhieva I.P. , Mareev A.V. , Fedorenko A.D. , Shayapov V.R. , Kosinova M.L.
Synthesis of Tris(allylamino)ethylsilane, Tetrakis(allylamino)silane, and Silicon Carbonitride Films Based Thereon by Gas-Phase Processes
Russian Journal of Organic Chemistry. 2026. V.62. N6. 126 :1-8. DOI: 10.1134/s1070428026600841 WOS Scopus

Ермакова Е.Н. , Сысоев С.В. , Цырендоржиева И.П. , Мареев А.В. , Федоренко А.Д. , Шаяпов В.Р. , Косинова М.Л.
СИНТЕЗ ТРИ(АЛЛИЛАМИНО)ЭТИЛСИЛАНА, ТЕТРА(АЛЛИЛАМИНО)СИЛАНА И ПЛЕНОК КАРБОНИТРИДА КРЕМНИЯ НА ИХ ОСНОВЕ В ГАЗОФАЗНЫХ ПРОЦЕССАХ
Журнал органической химии. 2026. Т.62. №5. С.711–719. DOI: 10.7868/S3034630426050082

Submitted:	Feb 25, 2026
Published print:	Aug 3, 2026

≡ Web of science:	WOS:001838762700003
≡ Scopus:	2-s2.0-105046359502