Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture

Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture Full article

Journal

Coatings
ISSN: 2079-6412

Output data

Year: 2023, Volume: 13, Number: 2, Article number : 310, Pages count : 22 DOI: 10.3390/coatings13020310

Authors

Ermakova Evgeniya ¹ , Kolodin Alexey ² , Fedorenko Anastasiya ³ , Yushina Irina ¹ , Shayapov Vladimir ¹ , Maksimovskiy Eugene ¹ , Kosinova Marina ¹

Affiliations

1	Laboratory of Functional Films and Coatings, Nikolaev Institute of Inorganic Chemistry, SB RAS, Novosibirsk 630090, Russia
2	Laboratory of Extraction, Nikolaev Institute of Inorganic Chemistry, SB RAS, Novosibirsk 630090, Russia
3	Laboratory of Nanomaterials, Nikolaev Institute of Inorganic Chemistry, SB RAS, Novosibirsk 630090, Russia

Funding (1)

Ministry of Science and Higher Education of the Russian Federation

121031700314-5

Ermakova E. , Kolodin A. , Fedorenko A. , Yushina I. , Shayapov V. , Maksimovskiy E. , Kosinova M.
Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture
Coatings. 2023. V.13. N2. 310 :1-22. DOI: 10.3390/coatings13020310 WOS Scopus OpenAlex

Submitted:	Dec 29, 2022
Published print:	Jan 30, 2023

Web of science:	WOS:000938378000001
Scopus:	2-s2.0-85149062913
OpenAlex:	W4318480590

DB	Citing
OpenAlex	11
Web of science	11
Scopus	8