Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture

Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture Научная публикация

Журнал

Coatings
ISSN: 2079-6412

Вых. Данные

Год: 2023, Том: 13, Номер: 2, Номер статьи : 310, Страниц : 22 DOI: 10.3390/coatings13020310

Авторы

Ermakova Evgeniya ¹ , Kolodin Alexey ² , Fedorenko Anastasiya ³ , Yushina Irina ¹ , Shayapov Vladimir ¹ , Maksimovskiy Eugene ¹ , Kosinova Marina ¹

Организации

1	Laboratory of Functional Films and Coatings, Nikolaev Institute of Inorganic Chemistry, SB RAS, Novosibirsk 630090, Russia
2	Laboratory of Extraction, Nikolaev Institute of Inorganic Chemistry, SB RAS, Novosibirsk 630090, Russia
3	Laboratory of Nanomaterials, Nikolaev Institute of Inorganic Chemistry, SB RAS, Novosibirsk 630090, Russia

Информация о финансировании (1)

Министерство науки и высшего образования Российской Федерации

121031700314-5

Ermakova E. , Kolodin A. , Fedorenko A. , Yushina I. , Shayapov V. , Maksimovskiy E. , Kosinova M.
Controlling of Chemical Bonding Structure, Wettability, Optical Characteristics of SiCN:H (SiC:H) Films Produced by PECVD Using Tetramethylsilane and Ammonia Mixture
Coatings. 2023. V.13. N2. 310 :1-22. DOI: 10.3390/coatings13020310 WOS Scopus OpenAlex

Поступила в редакцию:	29 дек. 2022 г.
Опубликована в печати:	30 янв. 2023 г.

Web of science:	WOS:000938378000001
Scopus:	2-s2.0-85149062913
OpenAlex:	W4318480590

БД	Цитирований
OpenAlex	9
Web of science	7
Scopus	8