|
81
|
Shayapov V.R.
, Kosinova M.L.
, Smirnov A.P.
, Maksimovskii E.A.
, Ayupov B.M.
, Rumyantsev Y.M.
Mechanical properties and density of BCxNy films grown by low-pressure chemical vapor deposition from triethylamine borane
Inorganic Materials. 2011.
V.47. P.262-266. DOI: 10.1134/S0020168511030204
WOS
Scopus
РИНЦ
OpenAlex
|
|
82
|
Korobeinichev O.P.
, Shmakov A.G.
, Chernov A.A.
, Kosinova M.L.
, Sulyaeva V.S.
, Kuznetsov F.A.
Thermal decomposition of trimethylamine borane as a precursor to nanocrystalline CVD BCxNy films
Inorganic Materials. 2011.
V.47. N11. P.1199-1204. DOI: 10.1134/s0020168511100128
WOS
Scopus
РИНЦ
OpenAlex
|
|
83
|
Шаяпов В.Р.
, Косинова М.Л.
, Смирнов А.П.
, Максимовский Е.А.
, Аюпов Б.М.
, Румянцев Ю.М.
Механические свойства и плотность пленок BCxNy, синтезированных из триэтиламинборана методом химического осаждения из газовой фазы при пониженном давлении
Неорганические материалы. 2011.
Т.43. №3. С.312-316.
РИНЦ
|
|
84
|
Sulyaeva V.S.
, Kosinova M.L.
, Rumyantsev Y.M.
, Golubenko A.N.
, Fainer N.I.
, Alferova N.I.
, Ayupov B.M.
, Gevko P.N.
, Kesler V.G.
, Kolesov B.A.
, Maksimovskii E.A.
, Myakishev K.G.
, Yushina I.V.
, Kuznetsov F.A.
Properties of BCxNy films grown by plasma-enhanced chemical vapor deposition from N-trimethylborazine-nitrogen mixtures
Inorganic Materials. 2010.
V.46. N5. P.487-494. DOI: 10.1134/s0020168510050092
WOS
Scopus
РИНЦ
OpenAlex
|
|
85
|
Baake O.
, Hoffmann P.S.
, Klein A.
, Pollakowski B.
, Beckhoff B.
, Kosinova M.L.
, Fainer N.I.
, Sulyaeva V.S.
, Trunova V.A.
, Ensinger W.
Speciation of BCxNy films grown by PECVD with trimethylborazine precursor
Analytical and Bioanalytical Chemistry. 2009.
V.395. N6. P.1901-1909. DOI: 10.1007/s00216-009-3056-6
WOS
Scopus
РИНЦ
OpenAlex
|
|
86
|
Sulyaeva V.
, Kosinova M.
, Golubenko A.
, Rumyantsev Y.
, Fainer N.I.
, Kuznetsov F.A.
PECVD BCxNy Films from Mixtures of N-trimethylborazine with Hydrogen and Ammonia: Modelling, Synthesis and Characterization
ECS transactions. 2009.
V.25. N8. P.343-348. DOI: 10.1149/1.3207611
WOS
Scopus
РИНЦ
OpenAlex
|
|
87
|
Baake O.
, Hoffmann P.S.
, Klein A.
, Pollakowski B.
, Beckhoff B.
, Ensinger W.
, Kosinova M.
, Fainer N.
, Sulyaeva V.S.
, Trunova V.
Chemical character of BCxNy layers grown by CVD with trimethylamine borane
X-Ray Spectrometry. 2009.
V.38. N1. P.68-73. DOI: 10.1002/xrs.1117
WOS
Scopus
РИНЦ
OpenAlex
|
|
88
|
Sulyaeva V.S.
, Rumyantsev Y.M.
, Kosinova M.L.
, Golubenko A.N.
, Fainer N.I.
, Kuznetsov F.A.
Plasma enhanced chemical vapour deposition of BCxNy films prepared from N-trimethylborazine: Modelling, synthesis and characterization
Surface & Coatings Technology. 2007.
V.201. N22-23. P.9009-9014. DOI: 10.1016/j.surfcoat.2007.04.016
WOS
Scopus
РИНЦ
OpenAlex
|