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Chemical bonds and elemental compositions of BCxNy layers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine Full article

Journal X-Ray Spectrometry
ISSN: 1097-4539 , E-ISSN: 0049-8246
Output data Year: 2012, Volume: 41, Number: 4, Pages: 240-246 Pages count : 7 DOI: 10.1002/xrs.2387
Authors Hoffmann Peter S. 1 , Baake Olaf 1 , Kosinova Marina L. 2 , Beckhoff Burkhard 3 , Klein Andreas 1 , Pollakowski Beatrix 3 , Trunova Valentina A. 2 , Sulyaeva Veronika S. 2 , Kuznetsov Fedor A. 2 , Ensinger Wolfgang 1
Affiliations
1 Department of Materials Science, Technische Universität Darmstadt, Petersenstr. 23, 64287 Darmstadt, Germany
2 Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences, Acad. Lavrentyev Pr. 3, Novosibirsk 630090, Russia
3 Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, 10587 Berlin, Germany
Cite: Hoffmann P.S. , Baake O. , Kosinova M.L. , Beckhoff B. , Klein A. , Pollakowski B. , Trunova V.A. , Sulyaeva V.S. , Kuznetsov F.A. , Ensinger W.
Chemical bonds and elemental compositions of BCxNy layers produced by chemical vapor deposition with trimethylamine borane, triethylamine borane, or trimethylborazine
X-Ray Spectrometry. 2012. V.41. N4. P.240-246. DOI: 10.1002/xrs.2387 WOS Scopus OpenAlex
Dates:
Submitted: Feb 10, 2011
Accepted: Feb 3, 2012
Published online: Mar 7, 2012
Identifiers:
Web of science: WOS:000305514800010
Scopus: 2-s2.0-84862770347
OpenAlex: W1947967361
Citing:
DB Citing
OpenAlex 13
Scopus 11
Web of science 11
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