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Speciation of BCxNy films grown by PECVD with trimethylborazine precursor Full article

Journal Analytical and Bioanalytical Chemistry
ISSN: 1618-2642 , E-ISSN: 1618-2650
Output data Year: 2009, Volume: 395, Number: 6, Pages: 1901-1909 Pages count : 9 DOI: 10.1007/s00216-009-3056-6
Authors Baake Olaf 1 , Hoffmann Peter S. 1 , Klein Andreas 1 , Pollakowski Beatrix 2 , Beckhoff Burkhard 2 , Kosinova Marina L. 3 , Fainer Nadeshda I. 3 , Sulyaeva Veronica S. 3 , Trunova Valentina A. 3 , Ensinger Wolfgang 1
Affiliations
1 Department of Materials Science, Technische Universität Darmstadt, Petersenstr. 23, 64287 Darmstadt, Germany
2 Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, 10587 Berlin, Germany
3 Russian Academy of Sciences, Nikolaev Institute of Inorganic Chemistry Siberian Branch, Acad. Lavrentyev Pr. 3, Novosibirsk 630090, Russia
Cite: Baake O. , Hoffmann P.S. , Klein A. , Pollakowski B. , Beckhoff B. , Kosinova M.L. , Fainer N.I. , Sulyaeva V.S. , Trunova V.A. , Ensinger W.
Speciation of BCxNy films grown by PECVD with trimethylborazine precursor
Analytical and Bioanalytical Chemistry. 2009. V.395. N6. P.1901-1909. DOI: 10.1007/s00216-009-3056-6 WOS Scopus РИНЦ OpenAlex
Dates:
Submitted: Apr 1, 2009
Accepted: Aug 11, 2009
Identifiers:
Web of science: WOS:000271395600034
Scopus: 2-s2.0-70449596023
Elibrary: 15299252
OpenAlex: W1977543748
Citing:
DB Citing
OpenAlex 14
Web of science 13
Scopus 13
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