PECVD synthesis and optical properties of BCXNY films obtained from N-triethylborazine as a single-source precursor

Journal

Surface & Coatings Technology
ISSN: 1879-3347 , E-ISSN: 0257-8972

Output data

Year: 2013, Volume: 230, Pages: 145-151 Pages count : 7 DOI: 10.1016/j.surfcoat.2013.06.018

Authors

Sulyaeva V.S. ¹ , Kosinova M.L. ¹ , Rumyantsev Yu.M. ¹ , Kesler V.G. ² , Kuznetsov F.A. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, SB RAS 3, Acad. Lavrentiev Ave., Novosibirsk, 630090, Russia
2	Rzhanov Institute of Semiconductor Physics, SB RAS 13, Acad. Lavrentiev Ave., Novosibirsk, 630090, Russia

Sulyaeva V.S. , Kosinova M.L. , Rumyantsev Y.M. , Kesler V.G. , Kuznetsov F.A.
PECVD synthesis and optical properties of BCXNY films obtained from N-triethylborazine as a single-source precursor
Surface & Coatings Technology. 2013. V.230. P.145-151. DOI: 10.1016/j.surfcoat.2013.06.018 WOS Scopus РИНЦ OpenAlex

Published online:

Jun 14, 2013