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PECVD synthesis and optical properties of BCXNY films obtained from N-triethylborazine as a single-source precursor Full article

Journal Surface & Coatings Technology
ISSN: 1879-3347 , E-ISSN: 0257-8972
Output data Year: 2013, Volume: 230, Pages: 145-151 Pages count : 7 DOI: 10.1016/j.surfcoat.2013.06.018
Authors Sulyaeva V.S. 1 , Kosinova M.L. 1 , Rumyantsev Yu.M. 1 , Kesler V.G. 2 , Kuznetsov F.A. 1
Affiliations
1 Nikolaev Institute of Inorganic Chemistry, SB RAS 3, Acad. Lavrentiev Ave., Novosibirsk, 630090, Russia
2 Rzhanov Institute of Semiconductor Physics, SB RAS 13, Acad. Lavrentiev Ave., Novosibirsk, 630090, Russia
Cite: Sulyaeva V.S. , Kosinova M.L. , Rumyantsev Y.M. , Kesler V.G. , Kuznetsov F.A.
PECVD synthesis and optical properties of BCXNY films obtained from N-triethylborazine as a single-source precursor
Surface & Coatings Technology. 2013. V.230. P.145-151. DOI: 10.1016/j.surfcoat.2013.06.018 WOS Scopus РИНЦ OpenAlex
Dates:
Published online: Jun 14, 2013
Identifiers:
Web of science: WOS:000323855700023
Scopus: 2-s2.0-84881316993
Elibrary: 20453526
OpenAlex: W2003675575
Citing:
DB Citing
OpenAlex 23
Web of science 20
Scopus 21
Elibrary 20
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