PECVD synthesis and optical properties of BCXNY films obtained from N-triethylborazine as a single-source precursor Научная публикация

Журнал	Surface & Coatings Technology ISSN: 1879-3347 , E-ISSN: 0257-8972
Вых. Данные	Год: 2013, Том: 230, Страницы: 145-151 Страниц : 7 DOI: 10.1016/j.surfcoat.2013.06.018
Авторы	Sulyaeva V.S. 1 , Kosinova M.L. 1 , Rumyantsev Yu.M. 1 , Kesler V.G. 2 , Kuznetsov F.A. 1
Организации	1 Nikolaev Institute of Inorganic Chemistry, SB RAS 3, Acad. Lavrentiev Ave., Novosibirsk, 630090, Russia 2 Rzhanov Institute of Semiconductor Physics, SB RAS 13, Acad. Lavrentiev Ave., Novosibirsk, 630090, Russia