PECVD BCxNy Films from Mixtures of N-trimethylborazine with Hydrogen and Ammonia: Modelling, Synthesis and Characterization

PECVD BCxNy Films from Mixtures of N-trimethylborazine with Hydrogen and Ammonia: Modelling, Synthesis and Characterization Full article

Journal

ECS transactions
ISSN: 2151-2051 , E-ISSN: 1938-5862

Output data

Year: 2009, Volume: 25, Number: 8, Pages: 343-348 Pages count : 6 DOI: 10.1149/1.3207611

Authors

Sulyaeva Veronika ¹ , Kosinova Marina ¹ , Golubenko Asya ² , Rumyantsev Yuri ¹ , Fainer Nadezhda I. ¹ , Kuznetsov Fedor A. ¹

Affiliations

1	Department of Chemistry of Functional Materials, Nikolaev Institute of Inorganic Chemistry SB RAS, Novosibirsk 630090, Russia
2	Department of Natural Sciences, Novosibirsk State University, Novosibirsk 630090, Russia

Sulyaeva V. , Kosinova M. , Golubenko A. , Rumyantsev Y. , Fainer N.I. , Kuznetsov F.A.
PECVD BCxNy Films from Mixtures of N-trimethylborazine with Hydrogen and Ammonia: Modelling, Synthesis and Characterization
ECS transactions. 2009. V.25. N8. P.343-348. DOI: 10.1149/1.3207611 WOS Scopus РИНЦ OpenAlex

Web of science:	WOS:000338305900042
Scopus:	2-s2.0-76549096622
Elibrary:	15311755
OpenAlex:	W2285461335

DB	Citing
OpenAlex	2
Web of science	2
Scopus	1