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Chemical character of BCxNy layers grown by CVD with trimethylamine borane Full article

Journal X-Ray Spectrometry
ISSN: 1097-4539 , E-ISSN: 0049-8246
Output data Year: 2009, Volume: 38, Number: 1, Pages: 68-73 Pages count : 6 DOI: 10.1002/xrs.1117
Authors Baake O. 1 , Hoffmann P.S. 1 , Klein A. 1 , Pollakowski B. 2 , Beckhoff B. 2 , Ensinger W. 1 , Kosinova M. 3 , Fainer N. 3 , Sulyaeva V.S. 3 , Trunova V. 3
Affiliations
1 Technische Universitat Darmstadt, Department of Materials Science, Petersenstr. 23, D-64287, Darmstadt, Germany
2 Physikalisch-Technische Bundesanstalt, Abbestr. 2-12, D-10587Berlin, Germany
3 Nikolaev Institute of Inorganic Chemistry SB RAS, Acad. Lavrentyev Pr. 3, Novosibirsk 630090, Russian Federation
Cite: Baake O. , Hoffmann P.S. , Klein A. , Pollakowski B. , Beckhoff B. , Ensinger W. , Kosinova M. , Fainer N. , Sulyaeva V.S. , Trunova V.
Chemical character of BCxNy layers grown by CVD with trimethylamine borane
X-Ray Spectrometry. 2009. V.38. N1. P.68-73. DOI: 10.1002/xrs.1117 WOS Scopus РИНЦ OpenAlex
Dates:
Submitted: Apr 22, 2008
Accepted: Sep 19, 2008
Published online: Nov 4, 2008
Identifiers:
Web of science: WOS:000262272400010
Scopus: 2-s2.0-59849124643
Elibrary: 13614626
OpenAlex: W2009877987
Citing:
DB Citing
OpenAlex 27
Web of science 22
Scopus 23
Elibrary 22
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