X-ray photoelectron and auger spectroscopic study of the chemical composition of BCxNy films

X-ray photoelectron and auger spectroscopic study of the chemical composition of BCxNy films Full article

Journal

Journal of Structural Chemistry
ISSN: 1573-8779 , E-ISSN: 0022-4766

Output data

Year: 2012, Volume: 53, Number: 4, Pages: 699-707 Pages count : 9 DOI: 10.1134/s0022476612040129

Authors

Kesler V.G. ¹ , Kosinova M.L. ² , Rumyantsev Yu.M. ² , Sulyaeva V.S. ²

Affiliations

1	A. V. Rzhanov Institute of Semiconductor Physics, Siberian Division, Russian Academy of Sciences, Novosibirsk
2	A. V. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, Novosibirsk

Kesler V.G. , Kosinova M.L. , Rumyantsev Y.M. , Sulyaeva V.S.
X-ray photoelectron and auger spectroscopic study of the chemical composition of BCxNy films
Journal of Structural Chemistry. 2012. V.53. N4. P.699-707. DOI: 10.1134/s0022476612040129 WOS Scopus РИНЦ OpenAlex

Кеслер В.Г. , Косинова М.Л. , Румянцев Ю.М. , Суляева В.С.
Исследование химического состава пленок BCxNy методами РФЭС и Оже-спектроскопии
Журнал структурной химии. 2012. Т.53. №4. С.710 – 717.

Published print:	Aug 1, 2012
Submitted:	Dec 12, 2012

Web of science:	WOS:000309346900012
Scopus:	2-s2.0-84867059496
Elibrary:	20489712
OpenAlex:	W2091066848

DB	Citing
Web of science	12
OpenAlex	12
Scopus	12
Elibrary	11