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1
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Хижняк Е.А.
, Шаяпов В.Р.
, Корольков И.В.
, Дудкина С.П.
, Гейдт П.В.
, Лебедев М.С.
ВЛИЯНИЕ ТЕМПЕРАТУР ОСАЖДЕНИЯ И ОТЖИГА НА ФАЗОВЫЙ СОСТАВ ПЛЕНОК TiO2, ПОЛУЧЕННЫХ МЕТОДОМ АТОМНО-СЛОЕВОГО ОСАЖДЕНИЯ ИЗ ТЕТРАХЛОРИДА ТИТАНА И ВОДЫ
Журнал структурной химии. 2025.
Т.66. №2. 140578
:1-12. DOI: 10.26902/JSC_id140578
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2
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Khizhnyak E.A.
, Shayapov V.R.
, Korolkov I.V.
, Dudkina S.P.
, Geydt P.V.
, Lebedev M.S.
EFFECT OF DEPOSITION AND ANNEALING TEMPERATURES ON THE PHASE COMPOSITION OF TiO2 FILMS OBTAINED BY ATOMIC LAYER DEPOSITION FROM TITANIUM TETRACHLORIDE AND WATER
Journal of Structural Chemistry. 2025.
V.66. N2. P.293-303. DOI: 10.1134/S0022476625020088
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3
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Peschenyuk Y.A.
, Semenov A.A.
, Ayvazyan G.Y.
, Lebedev M.S.
, Gatapova E.Y.
Bubble growth in a volatile liquid drop: interface dynamics
Thermophysics and Aeromechanics. 2023.
V.29. N6. P.965-973. DOI: 10.1134/s0869864322060178
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4
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Petukhova D.E.
, Vikulova E.S.
, Korolkov I.V.
, Khmel S.Y.
, Lebedev M.S.
Growth Features and Phase Composition of Hf–Sc–O thin Films Synthesized by Atomic Layer Deposition
Journal of Structural Chemistry. 2023.
V.64. N3. P.424-436. DOI: 10.1134/s0022476623030083
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5
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Petukhova D.E.
, Kichay V.N.
, Lebedev M.S.
The Structural and Electrical Properties of High-K Hf-Sm-O Thin Films Prepared by Atomic Layer Deposition
В сборнике
2023 IEEE 24th International Conference of Young Professionals in Electron Devices and Materials (EDM).
2023.
– ISBN 9798350336870. DOI: 10.1109/EDM58354.2023.10225098
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6
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Петухова Д.Е.
, Викулова Е.С.
, Корольков И.В.
, Хмель С.Я.
, Лебедев М.С.
Особенности роста и фазовый состав тонких плёнок Hf-Sc-O, синтезированных методом атомно-слоевого осаждения
Журнал структурной химии. 2023.
Т.64. №3. 107605
. DOI: 10.26902/jsc_id107605
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7
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Lee L.
, Chiang C-H.
, Shen Y-C.
, Wu S-C.
, Shih Y-C.
, Yang T-Y.
, Hsu Y-C.
, Cyu R-H.
, Yu Y-J.
, Hsieh S-H.
, Chen C-H.
, Lebedev M.
, Chueh Y-L.
Rational Design on Polymorphous Phase Switching in Molybdenum Diselenide-Based Memristor Assisted by All-Solid-State Reversible Intercalation toward Neuromorphic Application
ACS Nano. 2023.
V.17. N1. P.84-93. DOI: 10.1021/acsnano.2c04356
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8
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Ayvazyan G.Y.
, Kovalenko D.L.
, Lebedev M.S.
, Matevosyan L.A.
, Semchenko A.V.
Investigation of the Structural and Optical Properties of Silicon-Perovskite Structures with a Black Silicon Layer
Journal of contemporary physics /. 2022.
V.57. N3. P.274-279. DOI: 10.1134/s1068337222030069
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9
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Ayvazyan G.Y.
, Katkov M.V.
, Lebedev M.S.
, Shayapov V.R.
, Afonin M.Y.
, Petukhova D.E.
, Yushina I.V.
, Maksimovskii E.A.
, Aghabekyan A.V.
Anti-Reflection Properties of Black Silicon Coated with Thin Films of Metal Oxides by Atomic Layer Deposition
Journal of contemporary physics /. 2021.
V.56. N3. P.240-246. DOI: 10.3103/s1068337221030075
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10
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Ayvazyan G.Y.
, Aghabekyan A.V.
, Hakhoyan L.A.
, Katkov M.V.
, Lebedev M.S.
Passivation Properties of Atomic-Layer-Deposited Hafnium Oxide on Black Silicon Surface
В сборнике
2021 IEEE 32nd International Conference on Microelectronics, MIEL 2021 - Proceedings".
– Institute of Electrical and Electronics Engineers Inc..,
2021.
– C.145-147. – ISBN 978-1-6654-4528-3. DOI: 10.1109/miel52794.2021.9569183
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11
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Ayvazyan K.G.
, Katkov M.V.
, Lebedev M.S.
, Ayvazyan G.Y.
Enhanced Light-trapping with Conformal ALD Coating of Black Silicon by High-k Metal Oxides
В сборнике
Proceedings of the 2021 IEEE 11th International Conference "Nanomaterials: Applications and Properties", NAP 2021.
– Institute of Electrical and Electronics Engineers Inc..,
2021.
– ISBN 978-1-6654-3907-7. DOI: 10.1109/nap51885.2021.9568530
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12
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Katkov M.V.
, Ayvazyan G.Y.
, Shayapov V.R.
, Lebedev M.S.
Modeling of the Optical Properties of Black Silicon Passivated by Thin Films of Metal Oxides
Journal of contemporary physics /. 2020.
V.55. N1. P.16-22. DOI: 10.3103/s106833722001003x
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13
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Катков М.В.
, Айвазян Г.Е.
, Шаяпов В.Р.
, Лебедев М.С.
МОДЕЛИРОВАНИЕ ОПТИЧЕСКИХ СВОЙСТВ ЧЁРНОГО КРЕМНИЯ, ПАССИВИРОВАННОГО ТОНКИМИ ПЛЁНКАМИ ОКСИДОВ МЕТАЛЛОВ
Известия НАН РА. Физика. 2020.
Т.55. №1. С.24-32.
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14
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Lebedev M.S.
, Khmel S.Y.
, Lyulyukin M.N.
, Petukhova D.E.
, Barsukov A.V.
Low-temperature fabrication of SiO x -TiO 2 core-shell nanowires for photocatalytic application
Vacuum. 2019.
V.165. P.51-57. DOI: 10.1016/j.vacuum.2019.03.059
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15
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Lebedev M.S.
, Kruchinin V.N.
, Afonin M.Y.
, Korolkov I.V.
, Saraev A.A.
, Gismatulin A.A.
, Gritsenko V.A.
Optical properties and charge transport of textured Sc2O3 thin films obtained by atomic layer deposition
Applied Surface Science. 2019.
V.478. P.690-698. DOI: 10.1016/j.apsusc.2019.01.288
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16
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Atuchin V.V.
, Lebedev M.S.
, Korolkov I.V.
, Kruchinin V.N.
, Maksimovskii E.A.
, Trubin S.V.
Composition-sensitive growth kinetics and dispersive optical properties of thin HfxTi1−xO2 (0 ≤ x ≤ 1) films prepared by the ALD method
Journal of Materials Science: Materials in Electronics. 2019.
V.30. N1. P.812-823. DOI: 10.1007/s10854-018-0351-z
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17
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Mishchenko I.B.
, Petukhova D.E.
, Lebedev M.S.
Research of Atomic Layer Deposited HfO2/TiO2 Multilayer Structures by Spectroscopic and Multiangle Monochromatic Null Ellipsometry
В сборнике
2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM).
2018.
– C.26-29. DOI: 10.1109/edm.2018.8434943
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18
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Шаяпов В.Р.
, Лебедев М.С.
Исследование клиновидных плёнок оптическими методами. Часть II. Эксперименты
Оптический журнал. 2016.
Т.83. №7. С.76-82.
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19
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Shayapov V.R.
, Lebedev M.S.
Optical study of wedge-shaped films. Part II. Experiments
Journal of Optical Technology. 2016.
V.83. N7. P.447-451. DOI: 10.1364/JOT.83.000447
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РИНЦ
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