Articles - Sciact

Articles (24)

#	Публикация
21	Atuchin V.V. , Lebedev M.S. , Korolkov I.V. , Kruchinin V.N. , Maksimovskii E.A. , Trubin S.V. Composition-sensitive growth kinetics and dispersive optical properties of thin HfxTi1−xO2 (0 ≤ x ≤ 1) films prepared by the ALD method Journal of Materials Science: Materials in Electronics. 2019. V.30. N1. P.812-823. DOI: 10.1007/s10854-018-0351-z WOS Scopus OpenAlex
22	Mishchenko I.B. , Petukhova D.E. , Lebedev M.S. Research of Atomic Layer Deposited HfO2/TiO2 Multilayer Structures by Spectroscopic and Multiangle Monochromatic Null Ellipsometry In compilation 2018 19th International Conference of Young Specialists on Micro/Nanotechnologies and Electron Devices (EDM). 2018. – C.26-29. DOI: 10.1109/edm.2018.8434943 OpenAlex
23	Шаяпов В.Р. , Лебедев М.С. Исследование клиновидных плёнок оптическими методами. Часть II. Эксперименты Оптический журнал. 2016. Т.83. №7. С.76-82.
24	Shayapov V.R. , Lebedev M.S. Optical study of wedge-shaped films. Part II. Experiments Journal of Optical Technology. 2016. V.83. N7. P.447-451. DOI: 10.1364/JOT.83.000447 WOS Scopus РИНЦ OpenAlex

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