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Carbon-Rich Plasma-Deposited Silicon Oxycarbonitride Films Derived from 4-(Trimethylsilyl)morpholine as a Novel Single-Source Precursor Научная публикация

Журнал ChemPlusChem
ISSN: 1212-6950 , E-ISSN: 0010-0765
Вых. Данные Год: 2024, Том: 89, Номер статьи : e202400094, Страниц : 13 DOI: 10.1002/cplu.202400094
Ключевые слова PECVD; morpholine; optical bandgap; optical emission spectroscopy; organosilicon precursor; refractive index; silicon oxycarbonitride (SiCNO) coatings; thin film
Авторы Ermakova Evgeniya 1 , Tsyrendorzhieva Irina 2 , Mareev Alexander 2 , Pavlov Dmitry 2 , Maslova Olga 1 , Shayapov Vladimir 1 , Maksimovskiy Eugene 1 , Yushina Irina 1 , Kosinova Marina 1
Организации
1 Nikolaev Institute of Inorganic Chemistry, SB RAS
2 Favorsky Irkutsk Institute of Chemistry SB RAS

Реферат: 4-(trimethylsilyl)morpholine O(CH2CH2)2NSi(CH3)3 (TMSM) was investigated as a single-source precursor for SiCNO films synthesis. Optical emission spectroscopy of plasma generated from TMSM/He, TMSM/H2, and TMSM/NH3 gas mixtures revealed the presence of N2, CH, H, CN, and CO species. The last two are suggested to be responsible for the lowering of carbon concentration in the films in comparison with the precursor. The refractive index ranged from 1.5 to 2.0, and bandgap varied from 2.0 to 4.6 eV, which pointed that some of the films can be used as antireflective coatings in silicon photovoltaic cell technologies and dielectric layers in electronic devices.
Библиографическая ссылка: Ermakova E. , Tsyrendorzhieva I. , Mareev A. , Pavlov D. , Maslova O. , Shayapov V. , Maksimovskiy E. , Yushina I. , Kosinova M.
Carbon-Rich Plasma-Deposited Silicon Oxycarbonitride Films Derived from 4-(Trimethylsilyl)morpholine as a Novel Single-Source Precursor
ChemPlusChem. 2024. V.89. e202400094 :1-13. DOI: 10.1002/cplu.202400094 WOS Scopus РИНЦ OpenAlex
Даты:
Поступила в редакцию: 2 февр. 2024 г.
Принята к публикации: 24 апр. 2024 г.
Опубликована в печати: 22 мая 2024 г.
Идентификаторы БД:
Web of science: WOS:001228585300001
Scopus: 2-s2.0-85193818670
РИНЦ: 67255149
OpenAlex: W4395458375
Цитирование в БД: Пока нет цитирований
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