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Composition-sensitive growth kinetics and dispersive optical properties of thin HfxTi1−xO2 (0 ≤ x ≤ 1) films prepared by the ALD method Научная публикация

Журнал Journal of Materials Science: Materials in Electronics
ISSN: 1573-482X , E-ISSN: 0957-4522
Вых. Данные Год: 2019, Том: 30, Номер: 1, Страницы: 812-823 Страниц : 12 DOI: 10.1007/s10854-018-0351-z
Авторы Atuchin V.V. 1,2 , Lebedev M.S. 3 , Korolkov I.V. 4,5 , Kruchinin V.N. 6 , Maksimovskii E.A. 3,5 , Trubin S.V. 7
Организации
1 Laboratory of Optical Materials and Structures, Institute of Semiconductor Physics, SB RAS, Novosibirsk, Russia, 630090
2 Laboratory of Semiconductor and Dielectric Materials, Novosibirsk State University, Novosibirsk, Russia 630090
3 Laboratory of Functional Films and Coatings, Nikolaev Institute of Inorganic Chemistry, SB RAS, Novosibirsk, Russia, 630090
4 Laboratory of Crystal Chemistry, Nikolaev Institute of Inorganic Chemistry, SB RAS, Novosibirsk, Russia, 630090
5 Laboratory of Research Methods of Composition and Structure of Functional Materials, Novosibirsk State University, Novosibirsk, Russia 630090
6 Laboratory for Ellipsometry of Semiconductor Materials and Structures, Institute of Semiconductor Physics, SB RAS, Novosibirsk, Russia, 630090
7 Laboratory for Chemistry of Volatile Coordination and Metallorganic Compounds, Nikolaev Institute of Inorganic Chemistry, SB RAS, Novosibirsk, Russia, 630090
Библиографическая ссылка: Atuchin V.V. , Lebedev M.S. , Korolkov I.V. , Kruchinin V.N. , Maksimovskii E.A. , Trubin S.V.
Composition-sensitive growth kinetics and dispersive optical properties of thin HfxTi1−xO2 (0 ≤ x ≤ 1) films prepared by the ALD method
Journal of Materials Science: Materials in Electronics. 2019. V.30. N1. P.812-823. DOI: 10.1007/s10854-018-0351-z WOS Scopus OpenAlex
Даты:
Поступила в редакцию: 8 окт. 2018 г.
Принята к публикации: 8 нояб. 2018 г.
Опубликована online: 13 нояб. 2018 г.
Идентификаторы БД:
Web of science: WOS:000456048800087
Scopus: 2-s2.0-85056460912
OpenAlex: W2901255812
Цитирование в БД:
БД Цитирований
OpenAlex 33
Scopus 30
Web of science 33
Альметрики: