Получение тонких пленок Sm-Ti-O из реагентов Sm(iPrCp)3, TiCl4 и H2O - Conference attendances

Получение тонких пленок Sm-Ti-O из реагентов Sm(iPrCp)3, TiCl4 и H2O Conference attendances

Language

Русский

Participant type

Устный

Conference

IV Международная конференция “Атомно-Слоевое осаждение: Россия - 2023”
15-18 Sep 2023 , Махачкала

Authors

Петухова Д.Е. ¹ , Лебедев М.С. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences

The Sm(iPrCp)3 and TiCl4, with water vapors as the sole oxygen source, were applied for the SmxTi1-xOy (x=0-1) thin films synthesis using PICOSUN™ R-200 Advanced ALD System. The growth process, chemical composition, and structure of the samples were characterized. The obtained ununiformity of Sm-rich films could be ascribed to CVD-like reactions between the Sm(iPrCp)3 precursor and excess physisorbed H2O on the hygroscopic Sm2O3 surface. According to XPS data, samarium and titanium are in the Sm3+ and Ti4+ valence states. XRD and SEM studies revealed that the films were amorphous for the entire investigated concentration range and had a surface with no pronounced features.

Петухова Д.Е. , Лебедев М.С.
Получение тонких пленок Sm-Ti-O из реагентов Sm(iPrCp)3, TiCl4 и H2O
IV Международная конференция “Атомно-Слоевое осаждение: Россия - 2023” 15-18 сент. 2023