Thermodynamic Modeling of Phase Formation in the Co–O–C–H–He System Full article
| Journal |
Russian Journal of Inorganic Chemistry
ISSN: 0036-0236 , E-ISSN: 1531-8613 |
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| Output data | Year: 2026, Volume: 71, Number: 7, Pages: 960–963 Pages count : 4 DOI: 10.1134/S0036023626601248 | ||||
| Tags | chemical vapor deposition, cobalt-containing coatings, cobalt acetylacetonate, cobalt oxide | ||||
| Authors |
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| Affiliations |
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Funding (1)
| 1 | Ministry of Science and Higher Education of the Russian Federation | 121031700321-3 |
Abstract:
The decomposition of cobalt acetylacetonate in a mixture with oxygen was studied using a thermodynamic
approach to construct chemical vapor deposition diagrams. The calculations were performed using
the database and software of the Electronic Materials Properties Database. The process was assumed to proceed
in a quasi-equilibrium regime on a chemically inert substrate in the reactor temperature range of 473–
1073 K at a pressure of 1.333 or 101325 Pa. Calculations indicate that MOCVD processes can produce films
containing, depending on the conditions, cobalt and cobalt oxides CoO and Co3O4, as well as various complexes
of these phases, including mixtures with carbon. The results of this study may be useful for producing
cobalt-containing coatings.
Cite:
Shestakov V.A.
, Kosinova M.L.
Thermodynamic Modeling of Phase Formation in the Co–O–C–H–He System
Russian Journal of Inorganic Chemistry. 2026. V.71. N7. P.960–963. DOI: 10.1134/S0036023626601248 WOS Scopus OpenAlex
Thermodynamic Modeling of Phase Formation in the Co–O–C–H–He System
Russian Journal of Inorganic Chemistry. 2026. V.71. N7. P.960–963. DOI: 10.1134/S0036023626601248 WOS Scopus OpenAlex
Dates:
| Submitted: | Mar 11, 2026 |
| Accepted: | Apr 15, 2026 |
| Published print: | Aug 31, 2026 |
Identifiers:
| ≡ Web of science: | WOS:001864361700015 |
| ≡ Scopus: | 2-s2.0-105048885517 |
| ≡ OpenAlex: | W7204807771 |