Thermodynamic Modeling of Phase Formation in the Co–O–C–H–He System | Sciact

Thermodynamic Modeling of Phase Formation in the Co–O–C–H–He System Научная публикация

Журнал

Russian Journal of Inorganic Chemistry
ISSN: 0036-0236 , E-ISSN: 1531-8613

Вых. Данные

Год: 2026, Том: 71, Номер: 7, Страницы: 960–963 Страниц : 4 DOI: 10.1134/S0036023626601248

Ключевые слова

chemical vapor deposition, cobalt-containing coatings, cobalt acetylacetonate, cobalt oxide

Авторы

Shestakov V.A. ^1,2 , Kosinova M.L. ¹

Организации

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences
2	Novosibirsk State University of Architecture and Civil Engineering

Информация о финансировании (1)

Министерство науки и высшего образования Российской Федерации

121031700321-3

The decomposition of cobalt acetylacetonate in a mixture with oxygen was studied using a thermodynamic approach to construct chemical vapor deposition diagrams. The calculations were performed using the database and software of the Electronic Materials Properties Database. The process was assumed to proceed in a quasi-equilibrium regime on a chemically inert substrate in the reactor temperature range of 473– 1073 K at a pressure of 1.333 or 101325 Pa. Calculations indicate that MOCVD processes can produce films containing, depending on the conditions, cobalt and cobalt oxides CoO and Co3O4, as well as various complexes of these phases, including mixtures with carbon. The results of this study may be useful for producing cobalt-containing coatings.

Shestakov V.A. , Kosinova M.L.
Thermodynamic Modeling of Phase Formation in the Co–O–C–H–He System
Russian Journal of Inorganic Chemistry. 2026. V.71. N7. P.960–963. DOI: 10.1134/S0036023626601248 WOS Scopus OpenAlex

Поступила в редакцию:	11 мар. 2026 г.
Принята к публикации:	15 апр. 2026 г.
Опубликована в печати:	31 авг. 2026 г.

≡ Web of science:	WOS:001864361700015
≡ Scopus:	2-s2.0-105048885517
≡ OpenAlex:	W7204807771