Synthesis of titaniferous films by the method of magnetron sputtering in a discharge with a small anode followed by annealing in nitrogen and air

Synthesis of titaniferous films by the method of magnetron sputtering in a discharge with a small anode followed by annealing in nitrogen and air Full article

Journal

Thermophysics and Aeromechanics
ISSN: 1531-8699 , E-ISSN: 0869-8643

Output data

Year: 2025, Volume: 32, Number: 4, Pages: 937-943 Pages count : 7 DOI: 10.1134/s0869864325040110

Authors

Zaitsev O.V. ^1,2 , Gareev T.I. ^1,2 , Nerushev O.A. ¹ , Sorokin D.V. ^1,2 , Korol’kov I.V. ³ , Sulyaeva V.S. ³

Affiliations

1	Kutateladze Institute of Thermophysics SB RAS, Novosibirsk, Russia
2	Novosibirsk State University, Novosibirsk, Russia
3	Nikolaev Institute of Inorganic Chemistry SB RAS, Novosibirsk, Russia

Zaitsev O.V. , Gareev T.I. , Nerushev O.A. , Sorokin D.V. , Korol’kov I.V. , Sulyaeva V.S.
Synthesis of titaniferous films by the method of magnetron sputtering in a discharge with a small anode followed by annealing in nitrogen and air
Thermophysics and Aeromechanics. 2025. V.32. N4. P.937-943. DOI: 10.1134/s0869864325040110 WOS Scopus OpenAlex

Зайцев О.В. , Гареев Т.И. , Нерушев О.А. , Сорокин Д.В. , Корольков И.В. , Суляева В.С.
Синтез титаносодержащих пленок методом магнетронного распыления в разряде с малым анодом при отжиге в азоте и воздухе
Теплофизика и Аэромеханика. 2025. Т.32. №4. С.755-761. DOI: 10.63430/TIA202504011 OpenAlex

Submitted:	Jun 16, 2025
Published print:	May 14, 2026

≡ Web of science:	WOS:001766638800002
≡ Scopus:	2-s2.0-105039148599
≡ OpenAlex:	W7161172116