Thermodynamic Characterization of Volatile Alkylamine Boranes as Precursors for the Formation of BCxNy Films

Thermodynamic Characterization of Volatile Alkylamine Boranes as Precursors for the Formation of BCxNy Films Full article

Journal

Russian Journal of Inorganic Chemistry
ISSN: 0036-0236 , E-ISSN: 1531-8613

Output data

Year: 2023, Volume: 68, Pages: 202–207 Pages count : DOI: 10.1134/S0036023622602173

Authors

Sysoev S.V. ¹ , Sulyaeva V.S. ¹ , Kosinova M.L. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090 Russia

Sysoev S.V. , Sulyaeva V.S. , Kosinova M.L.
Thermodynamic Characterization of Volatile Alkylamine Boranes as Precursors for the Formation of BCxNy Films
Russian Journal of Inorganic Chemistry. 2023. V.68. P.202–207. DOI: 10.1134/S0036023622602173 WOS Scopus OpenAlex

Сысоев С.В. , Суляева В.С. , Косинова М.Л.
Термодинамическая характеризация летучих алкиламинборанов как прекурсоров формирования пленок BCxNy
Журнал неорганической химии. 2023. Т.68. №2. С.241–247. DOI: 10.31857/S0044457X22601535 РИНЦ OpenAlex

Submitted:	Aug 26, 2022
Published print:	Sep 1, 2023

Web of science:	WOS:001102243700032
Scopus:	2-s2.0-85171596005
OpenAlex:	W4386890034

DB	Citing
OpenAlex	1
Web of science	1
Scopus	1