Influence of Precursor Gas Flow Rate on Fluoropolymer Coating Growth Rate During Hot Wire Chemical Vapor Deposition Full article

Journal	Journal of Applied Mechanics and Technical Physics ISSN: 1573-8620 , E-ISSN: 0021-8944
Output data	Year: 2018, Volume: 59, Number: 5, Pages: 842-846 Pages count : 5 DOI: 10.1134/S0021894418050103
Authors	Safonov A.I. 1 , Sulyaeva V.S. 2 , Bogoslovtseva A.L. 1 , Timoshenko N.I. 1
Affiliations	1 Kutateladze Institute of Thermophysics, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090 Russia 2 Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, Novosibirsk, 630090 Russia