Application of Surface Acoustic Wave Spectroscopy for Study of Physical Properties of Thin Films

Application of Surface Acoustic Wave Spectroscopy for Study of Physical Properties of Thin Films Научная публикация

Конференция

XIII INTERNATIONAL CONFERENCE AND SEMINAR ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES EDM 2012
02-06 июл. 2012 , Эрлагол, республика Алтай

Сборник

XIII INTERNATIONAL CONFERENCE AND SEMINAR ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES EDM 2012
Сборник, IEEE. 2012. ISBN 978-1-4673-2520-2.

Вых. Данные

Год: 2012, Страницы: 99-102 Страниц : 4 DOI: 10.1109/EDM.2012.6310197

Ключевые слова

surface acoustic waves, sound velocity dispersion, Young’s modulus, density, thin films

Авторы

Shayapov Vladimir R. ¹

Организации

1	Nikolaev Institute of Inorganic Chemistry

Some possibilities of surface acoustic wave spectroscopy (SAWS) for thin films investigation are considered. Information value of SAWS method is dependent on the form of sound velocity dispersion curve. Non-linear dispersion curve allow obtaining of two values of four which describe film’s properties. Linear dispersion curve makes it possible to calculate only one film’s property. Special approach is presented to overcome this limitation. Boron carbonitride BCxNy and silicon carbonitride SiCxNyHz films are studied by SAWS. Their densities and Young’s modules are determined. The results are corresponding to known data on structure and composition of the films.

Shayapov V.R.
Application of Surface Acoustic Wave Spectroscopy for Study of Physical Properties of Thin Films
В сборнике XIII INTERNATIONAL CONFERENCE AND SEMINAR ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES EDM 2012. – IEEE., 2012. – C.99-102. – ISBN 978-1-4673-2520-2. DOI: 10.1109/EDM.2012.6310197 OpenAlex

OpenAlex:

W2018165089

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