Application of Surface Acoustic Wave Spectroscopy for Study of Physical Properties of Thin Films

Application of Surface Acoustic Wave Spectroscopy for Study of Physical Properties of Thin Films Full article

Conference

XIII INTERNATIONAL CONFERENCE AND SEMINAR ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES EDM 2012
02-06 Jul 2012 , Эрлагол, республика Алтай

Source

XIII INTERNATIONAL CONFERENCE AND SEMINAR ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES EDM 2012
Compilation, IEEE. 2012. ISBN 978-1-4673-2520-2.

Output data

Year: 2012, Pages: 99-102 Pages count : 4 DOI: 10.1109/EDM.2012.6310197

Tags

surface acoustic waves, sound velocity dispersion, Young’s modulus, density, thin films

Authors

Shayapov Vladimir R. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry

Some possibilities of surface acoustic wave spectroscopy (SAWS) for thin films investigation are considered. Information value of SAWS method is dependent on the form of sound velocity dispersion curve. Non-linear dispersion curve allow obtaining of two values of four which describe film’s properties. Linear dispersion curve makes it possible to calculate only one film’s property. Special approach is presented to overcome this limitation. Boron carbonitride BCxNy and silicon carbonitride SiCxNyHz films are studied by SAWS. Their densities and Young’s modules are determined. The results are corresponding to known data on structure and composition of the films.

Shayapov V.R.
Application of Surface Acoustic Wave Spectroscopy for Study of Physical Properties of Thin Films
In compilation XIII INTERNATIONAL CONFERENCE AND SEMINAR ON MICRO/NANOTECHNOLOGIES AND ELECTRON DEVICES EDM 2012. – IEEE., 2012. – C.99-102. – ISBN 978-1-4673-2520-2. DOI: 10.1109/EDM.2012.6310197 OpenAlex

OpenAlex:

W2018165089

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