Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment

Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment Full article

Journal

Russian Journal of Inorganic Chemistry
ISSN: 0036-0236 , E-ISSN: 1531-8613

Output data

Year: 2022, Volume: 67, Number: 12, Pages: 1956-1961 Pages count : 6 DOI: 10.1134/s0036023622601179

Tags

thermodynamic modeling, CVD process, thin films, vanadium dioxide

Authors

Shestakov V.A. ^1,2 , Yakovkina L.V. ¹ , Kichay V.N. ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia
2	Novosibirsk State University of Architecture and Civil Engineering

The thermodynamic modeling and experimental study of the synthesis of vanadium dioxide from vanadyl acetylacetonate VO(acac)2 and oxygen in an argon atmosphere have been carried out. The method used for calculating chemical equilibria in thermodynamic modeling was based on minimizing the Gibbs energy of the system. In the experiments, chemical vapor deposition (CVD) was used to prepare films. The results of thermodynamic modeling and the obtained experimental data can be useful in developing methods for preparing films suitable for use in solid-state devices.

Shestakov V.A. , Yakovkina L.V. , Kichay V.N.
Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment
Russian Journal of Inorganic Chemistry. 2022. V.67. N12. P.1956-1961. DOI: 10.1134/s0036023622601179 Scopus OpenAlex

Submitted:	Apr 20, 2022
Accepted:	Jun 22, 2022

Scopus:	2-s2.0-85144464476
OpenAlex:	W4312080427

DB	Citing
Scopus	2
OpenAlex	3