Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment Full article
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Russian Journal of Inorganic Chemistry
ISSN: 0036-0236 , E-ISSN: 1531-8613 |
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| Output data | Year: 2022, Volume: 67, Number: 12, Pages: 1956-1961 Pages count : 6 DOI: 10.1134/s0036023622601179 | ||||
| Tags | thermodynamic modeling, CVD process, thin films, vanadium dioxide | ||||
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Abstract:
The thermodynamic modeling and experimental study of the synthesis of vanadium dioxide from vanadyl acetylacetonate VO(acac)2 and oxygen in an argon atmosphere have been carried out. The method used for calculating chemical equilibria in thermodynamic modeling was based on minimizing the Gibbs energy of the system. In the experiments, chemical vapor deposition (CVD) was used to prepare films. The results of thermodynamic modeling and the obtained experimental data can be useful in developing methods for preparing films suitable for use in solid-state devices.
Cite:
Shestakov V.A.
, Yakovkina L.V.
, Kichay V.N.
Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment
Russian Journal of Inorganic Chemistry. 2022. V.67. N12. P.1956-1961. DOI: 10.1134/s0036023622601179 WOS Scopus OpenAlex
Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment
Russian Journal of Inorganic Chemistry. 2022. V.67. N12. P.1956-1961. DOI: 10.1134/s0036023622601179 WOS Scopus OpenAlex
Original:
Шестаков В.А.
, Яковкина Л.В.
, Кичай В.Н.
Синтез диоксида ванадия из смеси ацетилацетоната ванадила и кислорода: моделирование и эксперимент
Журнал неорганической химии. 2022. Т.67. №12. С.1746-1752. DOI: 10.31857/S0044457X22600608 РИНЦ OpenAlex
Синтез диоксида ванадия из смеси ацетилацетоната ванадила и кислорода: моделирование и эксперимент
Журнал неорганической химии. 2022. Т.67. №12. С.1746-1752. DOI: 10.31857/S0044457X22600608 РИНЦ OpenAlex
Dates:
| Submitted: | Apr 20, 2022 |
| Accepted: | Jun 22, 2022 |
Identifiers:
| Web of science: | WOS:000921525000007 |
| Scopus: | 2-s2.0-85144464476 |
| OpenAlex: | W4312080427 |