Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment

Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment Научная публикация

Журнал

Russian Journal of Inorganic Chemistry
ISSN: 0036-0236 , E-ISSN: 1531-8613

Вых. Данные

Год: 2022, Том: 67, Номер: 12, Страницы: 1956-1961 Страниц : 6 DOI: 10.1134/s0036023622601179

Ключевые слова

thermodynamic modeling, CVD process, thin films, vanadium dioxide

Авторы

Shestakov V.A. ^1,2 , Yakovkina L.V. ¹ , Kichay V.N. ¹

Организации

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch, Russian Academy of Sciences, 630090, Novosibirsk, Russia
2	Novosibirsk State University of Architecture and Civil Engineering

The thermodynamic modeling and experimental study of the synthesis of vanadium dioxide from vanadyl acetylacetonate VO(acac)2 and oxygen in an argon atmosphere have been carried out. The method used for calculating chemical equilibria in thermodynamic modeling was based on minimizing the Gibbs energy of the system. In the experiments, chemical vapor deposition (CVD) was used to prepare films. The results of thermodynamic modeling and the obtained experimental data can be useful in developing methods for preparing films suitable for use in solid-state devices.

Shestakov V.A. , Yakovkina L.V. , Kichay V.N.
Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment
Russian Journal of Inorganic Chemistry. 2022. V.67. N12. P.1956-1961. DOI: 10.1134/s0036023622601179 WOS Scopus OpenAlex

Шестаков В.А. , Яковкина Л.В. , Кичай В.Н.
Синтез диоксида ванадия из смеси ацетилацетоната ванадила и кислорода: моделирование и эксперимент
Журнал неорганической химии. 2022. Т.67. №12. С.1746-1752. DOI: 10.31857/S0044457X22600608 РИНЦ OpenAlex

Поступила в редакцию:	20 апр. 2022 г.
Принята к публикации:	22 июн. 2022 г.

Web of science:	WOS:000921525000007
Scopus:	2-s2.0-85144464476
OpenAlex:	W4312080427

БД	Цитирований
Scopus	2
OpenAlex	3
Web of science	2