Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment Научная публикация
| Журнал |
Russian Journal of Inorganic Chemistry
ISSN: 0036-0236 , E-ISSN: 1531-8613 |
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| Вых. Данные | Год: 2022, Том: 67, Номер: 12, Страницы: 1956-1961 Страниц : 6 DOI: 10.1134/s0036023622601179 | ||||
| Ключевые слова | thermodynamic modeling, CVD process, thin films, vanadium dioxide | ||||
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Реферат:
The thermodynamic modeling and experimental study of the synthesis of vanadium dioxide from vanadyl acetylacetonate VO(acac)2 and oxygen in an argon atmosphere have been carried out. The method used for calculating chemical equilibria in thermodynamic modeling was based on minimizing the Gibbs energy of the system. In the experiments, chemical vapor deposition (CVD) was used to prepare films. The results of thermodynamic modeling and the obtained experimental data can be useful in developing methods for preparing films suitable for use in solid-state devices.
Библиографическая ссылка:
Shestakov V.A.
, Yakovkina L.V.
, Kichay V.N.
Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment
Russian Journal of Inorganic Chemistry. 2022. V.67. N12. P.1956-1961. DOI: 10.1134/s0036023622601179 Scopus OpenAlex
Synthesis of Vanadium Dioxide from a Mixture of Vanadyl Acetylacetonate and Oxygen: Simulation and Experiment
Russian Journal of Inorganic Chemistry. 2022. V.67. N12. P.1956-1961. DOI: 10.1134/s0036023622601179 Scopus OpenAlex
Даты:
| Поступила в редакцию: | 20 апр. 2022 г. |
| Принята к публикации: | 22 июн. 2022 г. |
Идентификаторы БД:
| Scopus: | 2-s2.0-85144464476 |
| OpenAlex: | W4312080427 |