New volatile cluster niobium thio-complexes as precursors for CVD process | Sciact

New volatile cluster niobium thio-complexes as precursors for CVD process Научная публикация

Конференция

The 1997 Joint International Meeting of The Electrochemical Society and The International Society of Electrochemistry and EUROCVD 11
01-05 сент. 1997 , Франция, Париж1 Sept 1997 → 5 Sept 1997

Сборник

Chemical Vapor Deposition: Proceedings of the Fourteenth International Conference and EUROCVD-11
Сборник, THE ELECTROCHEMICAL SOCIETY. Pennington, New York.1997. 1652 c. ISBN 1566771781.

Вых. Данные

Год: 1997, Том: 97-25, Страницы: 836–843 Страниц : 8

Авторы

Sokolov M.N. ¹ , Geras'ko O.A. ¹ , Majara A.P. ¹ , Semyannikov P.P. ¹ , Grankin V.M. ¹ , Belaya S.V. ¹ , Igumenov I.K. ¹

Организации

1	Institute of Inorganic Chemistry

There have been synthesised and investigated volatile Nb(IV) cluster complexes of a new type Nb2S4(beta-diketone)4 as precursors for preparing Nb-containing films by CVD. A simple way to synthesize them has been developed, including several complexes with fluorinated beta-diketones. All the compounds are rather stable in air and show a considerable volatility in vacuo. Vapor pressure values have been measured using Knudsen method. The compounds have been fully characterized by IR, Raman, electronic spectroscopy, mass spectrometry and elemental analysis. The structures of two compounds have been determined. DTA and TG in different atmospheres and in vacuo been carried out.

Sokolov M.N. , Geras'ko O.A. , Majara A.P. , Semyannikov P.P. , Grankin V.M. , Belaya S.V. , Igumenov I.K.
New volatile cluster niobium thio-complexes as precursors for CVD process
В сборнике Chemical Vapor Deposition: Proceedings of the Fourteenth International Conference and EUROCVD-11. – THE ELECTROCHEMICAL SOCIETY., 1997. – Т.25. – C.836–843. – ISBN 1566771781.

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