Chemical Vapor Deposition: Proceedings of the Fourteenth International Conference and EUROCVD-11
Сборник
| Язык |
Английский |
| Тип |
Сборник |
| ISBN |
1566771781 |
| Страниц |
1652 |
| Ключевые слова |
Нет электронной версии. Ссылка на книгу: https://books.google.ru/books/about/Chemical_Vapor_Deposition.html?id=1sDZ-1-y1zUC&redir_esc=y |
There have been synthesized and investigated volatile Nb(IV) cluster complexes of a new type Nb2S4(beta-diketone)4 as precursors for preparing Nb-containing films by CVD. A simple way to synthesize them has been developed, including several complexes with fluorinated beta-diketones. All the compounds are rather stable in air and show a considerable volatility in vacuo. Vapor pressure values have been measured using Knudsen method. The compounds have been fully characterized by IR, Raman, electronic spectroscopy, mass spectrometry and elemental analysis. The structures of two compounds have been determined. DTA and TG in different atmospheres and in vacuo been carried out.