New volatile cluster niobium thio-complexes as precursors for CVD process Full article
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The 1997 Joint International Meeting of The Electrochemical Society and The International Society of Electrochemistry and EUROCVD 11 01-05 Sep 1997 , Франция, Париж1 Sept 1997 → 5 Sept 1997 |
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| Source | Chemical Vapor Deposition: Proceedings of the Fourteenth International Conference and EUROCVD-11 Compilation, THE ELECTROCHEMICAL SOCIETY. Pennington, New York.1997. 1652 c. ISBN 1566771781. |
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| Output data | Year: 1997, Volume: 97-25, Pages: 836–843 Pages count : 8 | ||
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Abstract:
There have been synthesised and investigated volatile Nb(IV) cluster complexes of a new type Nb2S4(beta-diketone)4 as precursors for preparing Nb-containing films by CVD. A simple way to synthesize them has been developed, including several complexes with fluorinated beta-diketones. All the compounds are rather stable in air and show a considerable volatility in vacuo. Vapor pressure values have been measured using Knudsen method. The compounds have been fully characterized by IR, Raman, electronic spectroscopy, mass spectrometry and elemental analysis. The structures of two compounds have been determined. DTA and TG in different atmospheres and in vacuo been carried out.
Cite:
Sokolov M.N.
, Geras'ko O.A.
, Majara A.P.
, Semyannikov P.P.
, Grankin V.M.
, Belaya S.V.
, Igumenov I.K.
New volatile cluster niobium thio-complexes as precursors for CVD process
In compilation Chemical Vapor Deposition: Proceedings of the Fourteenth International Conference and EUROCVD-11. – THE ELECTROCHEMICAL SOCIETY., 1997. – Т.25. – C.836–843. – ISBN 1566771781.
New volatile cluster niobium thio-complexes as precursors for CVD process
In compilation Chemical Vapor Deposition: Proceedings of the Fourteenth International Conference and EUROCVD-11. – THE ELECTROCHEMICAL SOCIETY., 1997. – Т.25. – C.836–843. – ISBN 1566771781.
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