THERMODYNAMIC MODELING OF THE CVD PROCESS IN THE NI–SI–C–H SYSTEM

THERMODYNAMIC MODELING OF THE CVD PROCESS IN THE NI–SI–C–H SYSTEM Full article

Journal

Russian Journal of Inorganic Chemistry
ISSN: 0036-0236 , E-ISSN: 1531-8613

Output data

Year: 2024, Volume: 69, Pages: 37-41 Pages count : 5 DOI: 10.1134/s0036023623602441

Authors

Shestakov Vladimir Alekseevich ¹ , Kosinova Marina Leonidovna ¹

Affiliations

1	Nikolaev Institute of Inorganic Chemistry, Siberian Branch of Russian Academy of Sciences

Shestakov V.A. , Kosinova M.L.
THERMODYNAMIC MODELING OF THE CVD PROCESS IN THE NI–SI–C–H SYSTEM
Russian Journal of Inorganic Chemistry. 2024. V.69. P.37-41. DOI: 10.1134/s0036023623602441 WOS Scopus РИНЦ OpenAlex

Шестаков В.А. , Косинова М.Л.
ТЕРМОДИНАМИЧЕСКОЕ МОДЕЛИРОВАНИЕ ПРОЦЕССА CVD В СИСТЕМЕ Ni–Si–C–H
Журнал неорганической химии. 2024. Т.69. №1. С.43-48. DOI: 10.31857/S0044457X24010059 РИНЦ OpenAlex

Published print:

Mar 11, 2024

Web of science:	WOS:001180331200008
Scopus:	2-s2.0-85187158906
Elibrary:	66504379
OpenAlex:	W4392645039

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